# US 8,541,848 B2 · High-voltage MOSFETs having current diversion region in substrate near fieldplate

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- Number: US 8,541,848 B2
- Document ID: US8541848B2
- Status: Granted
- Kind: B2
- Application number: 13/271,342
- Filed: 2011-10-12
- Published: 2013-04-18
- Granted: 2013-09-24
- Earliest claimed: 2011-10-12
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Yun-Pei Huang; Yi-Feng Chang; Jam-Wem Lee
- Inventors: Yun-Pei Huang; Yi-Feng Chang; Jam-Wem Lee
- Web page: https://patentgrep.com/patent/US8541848B2

## CPC

- H10D 62/116: {adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions}
- H10D 30/65: Lateral DMOS [LDMOS] FETs
- H10D 62/109: {Reduced surface field [RESURF] PN junction structures}
- H10D 62/127: {of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs}
- H10D 62/393: {Body regions of DMOS transistors or IGBTs (cell layout of DMOS H10D62/127)}
- H10D 64/111: {Field plates}
- H10D 64/516: {the thicknesses being non-uniform}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

To limit or prevent current crowding, various HV-MOSFET embodiments include a current diversion region disposed near a drain region of an HV-MOSFET and near an upper surface of the semiconductor substrate. In some embodiments, the current diversion region is disposed near a field plate of the HV-MOSFET, wherein the field plate can also help to reduce or “smooth” electric fields near the drain to help limit current crowding. In some embodiments, the current diversion region is a p-doped, n-doped, or intrinsic region that is at a floating voltage potential. This current diversion region can push current deeper into the substrate of the HV-MOSFET (relative to conventional HV-MOSFETs), thereby reducing current crowding during ESD events. By reducing current crowding, the current diversion region makes the HV-MOSFETs disclosed herein more impervious to ESD events and, therefore, more reliable in real-world applications.

## Claims

### Claim 1

A semiconductor device, which is disposed on a semiconductor substrate having an upper surface, the semiconductor device comprising:
a source region disposed near the upper surface of the semiconductor substrate and having a first conductivity type;
a drain disposed near the upper surface of the semiconductor substrate and having the first conductivity type, the drain spaced apart from the source region;
a field oxide region disposed over the upper surface of the semiconductor substrate between the source and the drain;
a gate electrode disposed over the upper surface of the semiconductor substrate and disposed between the field oxide region and the source, wherein a gate dielectric is sandwiched between the gate electrode and the upper surface of the semiconductor substrate to provide electrical isolation there between;
a current diversion region disposed in the semiconductor substrate under a portion of the drain nearest the source region, the current diversion region having a second conductivity type opposite the first conductivity type and arranged to divert current flow between source and drain thereunder to limit current crowding at the portion of the drain nearest the source region; and
a conductive field plate disposed over a portion of the field oxide near the drain, wherein the current diversion region is self-aligned with respect to the conductive field plate.

### Claim 2 (depends on 1)

The semiconductor device of claim 1, wherein the current diversion region is arranged under the drain.

### Claim 3 (depends on 1)

The semiconductor device of claim 1, wherein the current diversion region abuts a lower region of the drain.

### Claim 4 (depends on 1)

The semiconductor device of claim 1, where current diversion region is electrically floating.

### Claim 5 (depends on 1)

The semiconductor device of claim 1, wherein a current path extends between the source region and the drain, the current path extending from the source region under the gate electrode, under the field oxide, and under the current diversion region to a second portion of the drain, wherein the current diversion region does not extend under the second portion of the drain.

### Claim 6

A semiconductor device, which is disposed on a semiconductor substrate having an upper surface, the semiconductor device comprising:
a first well disposed in the semiconductor substrate and having a first conductivity type;
a second well disposed within the first well and having a second conductivity type;
a source region disposed in the second well near the upper surface of the semiconductor substrate and having the first conductivity type;
a drain disposed in the first well and spaced apart from the source and the second well, wherein the drain is disposed near the upper surface of the semiconductor substrate and has the first conductivity type;
a field oxide region disposed over the upper surface of the semiconductor substrate between the drain and the second well;
a gate electrode disposed over the upper surface of the semiconductor substrate and disposed between the field oxide region and the source, wherein a gate dielectric is sandwiched between the gate electrode and the upper surface of the semiconductor substrate to provide electrical isolation there between;
a current diversion region disposed in the first well under a portion of the drain nearest the source region, the current diversion region having the second conductivity type and arranged to divert current flow between source and drain thereunder to limit current crowding at the portion of the drain nearest the source region; and
a conductive field plate disposed over a portion of the field oxide near the drain, wherein the current diversion region is self-aligned with respect to the conductive field plate.

### Claim 7 (depends on 6)

The semiconductor device of claim 6, wherein the current diversion region is under the drain.

### Claim 8 (depends on 6)

The semiconductor device of claim 6, wherein the current diversion region abuts a lower region of the drain.

### Claim 9 (depends on 6)

The semiconductor device of claim 6, where current diversion region is electrically floating.

### Claim 10 (depends on 6)

The semiconductor device of claim 6, further comprising:
a drain contact extending upwardly from the drain and providing an ohmic contact thereto.

### Claim 11 (depends on 10)

The semiconductor device of claim 10, where the current diversion region is spaced apart from the drain contact by a predetermined distance.

### Claim 12

A semiconductor device, which is disposed on a semiconductor substrate having an upper surface, the semiconductor device comprising:
a buried well disposed in the semiconductor substrate and having a first conductivity type;
a deep-well disposed abuttingly over the buried well and having a second conductivity type opposite the first conductivity type;
a high-voltage well disposed abuttingly over the deep well and having the first conductivity type;
a body well having the second conductivity type and extending downwardly from the upper substrate surface to the deep well and laterally abutting the high-voltage well;
a source disposed in the body well near the upper substrate surface and having the first conductivity type;
a drain disposed in the high-voltage well and spaced apart from the source and the body well, wherein the drain is disposed near the upper substrate surface and has the first conductivity type;
a current diversion region disposed in the high-voltage well under a portion of the drain nearest the source, the current diversion region having the second conductivity type and arranged to divert current flow between source and drain thereunder to limit current crowding near the portion of the drain nearest the source; and
a conductive field plate disposed over a portion of the field oxide near the drain, wherein the current diversion region is self-aligned with respect to the conductive field plate.

### Claim 13 (depends on 12)

The semiconductor device of claim 12, wherein the current diversion region abuts a lower region of the drain.

### Claim 14 (depends on 12)

The semiconductor device of claim 12, further comprising:
a field oxide region disposed over the upper surface of the semiconductor substrate between the drain and the body well.

### Claim 15 (depends on 14)

The semiconductor device of claim 14, further comprising:
a gate electrode disposed over the upper surface of the semiconductor substrate and disposed between the field oxide region and the source, wherein a gate dielectric is sandwiched between the gate electrode and the upper surface of the semiconductor substrate to provide electrical isolation there between.