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US 8,541,755 B1Granted
Electron microscope
AssigneeJEOL Ltd.
InventorHidetaka Sawada
Life of this patent
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Abstract
An electron microscope is offered which can correct chromatic and spherical aberrations without producing residual aberrations. In this microscope, a chromatic aberration-correcting optical system and a spherical aberration-correcting optical system are connected in series (in tandem) via a connection system. That is, the chromatic aberration-correcting optical system and the spherical aberration-correcting optical system are configured independently. Chromatic and spherical aberrations are corrected separately.
Claims1
An electron microscope comprising:
- an independent chromatic aberration-correcting optical system;
- an independent spherical aberration-correcting optical system configured independent of the chromatic aberration-correcting optical system and connected in series with the chromatic aberration-correcting optical system;
- and
- transfer lenses arranged between the independent chromatic aberration-correcting optical system and the independent spherical aberration-correcting optical system.
1 more element
Dependencies are inferred from the claim text.