# US 8,541,734 B2 · Avalanche impact ionization amplification devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,541,734 B2 - Document ID: US8541734B2 - Status: Granted - Kind: B2 - Application number: 13/603,567 - Filed: 2012-09-05 - Published: 2012-12-27 - Granted: 2013-09-24 - Earliest claimed: 2009-07-31 - Assignees: International Business Machines Corporation - Applicants: Solomon Assefa; Yurii A. Vlasov; Fengnian Xia - Inventors: Solomon Assefa; Yurii A. Vlasov; Fengnian Xia - Web page: https://patentgrep.com/patent/US8541734B2 ## CPC - H10F 30/225: the potential barrier working in avalanche mode, e.g. avalanche photodiodes - H10F 77/148: {Shapes of potential barriers} - H10F 77/206: {for devices having potential barriers} - H10F 77/413: {directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42)} - Y02E 10/50: Photovoltaic [PV] energy - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION ## Abstract A semiconductor photodetector may provide charge carrier avalanche multiplication at high field regions of a semiconductor material layer. A semiconductor current amplifier may provide current amplification by impact ionization near a high field region. A plurality of metal electrodes are formed on a surface of a semiconductor material layer and electrically biased to produce a non-uniform high electric field in which the high electric field strength accelerates avalanche electron-hole pair generation, which is employed as an effective avalanche multiplication photodetection mechanism or as an avalanche impact ionization current amplification mechanism. ## Claims ### Claim 1 A semiconductor structure comprising: a semiconductor material layer having a doping of a same conductivity type throughout and located on a substrate; at least one first-type electrode having angled corners and conductively connected to said semiconductor material layer and having a bottommost surface located above a top surface of said semiconductor material layer; at least one second-type electrode conductively connected to said semiconductor material layer; and a plurality of non-uniform electric field regions located in said semiconductor material layer and around said angled corners of said at least one first-type electrode, wherein said at least one first-type electrode is at a first voltage and said at least one second-type electrode is at a second voltage that is different from said first voltage, wherein said at least one first-type electrode and said at least one second-type electrode are in contact with said semiconductor material layer. ### Claim 2 (depends on 1) The semiconductor structure of claim 1, further comprising a thin material liner in contact with a surface of said semiconductor material layer and all of said at least one first-type electrode and said second-type electrode. ### Claim 3 (depends on 1) The semiconductor structure of claim 1, wherein said semiconductor material layer contains germanium. ### Claim 4 (depends on 1) The semiconductor structure of claim 1, wherein said plurality of non-uniform electric field regions is generated by a voltage-bias-generating device that applies a voltage bias across said at least one first-type electrode and said at least one second-type electrode. ### Claim 5 (depends on 4) The semiconductor structure of claim 4, wherein said voltage-bias-generating device is a device that is configured to generate a direct current (DC) voltage bias. ### Claim 6 A semiconductor structure comprising: a semiconductor material layer having a doping of a same conductivity type throughout and located on a substrate; at least one first-type electrode having angled corners and conductively connected to said semiconductor material layer and having a bottommost surface located above a top surface of said semiconductor material layer; at least one second-type electrode conductively connected to said semiconductor material layer; and a plurality of non-uniform electric field regions located in said semiconductor material layer and around said angled corners of said at least one first-type electrode, wherein said at least one first-type electrode is at a first voltage and said at least one second-type electrode is at a second voltage that is different from said first voltage, wherein said plurality of non-uniform electric field regions has a field strength at or above a critical field strength that triggers impact ionization and amplification of charge carriers in said semiconductor material. ### Claim 7 A semiconductor structure comprising: a semiconductor material layer having a doping of a same conductivity type throughout and located on a substrate; at least one first-type electrode having angled corners and conductively connected to said semiconductor material layer and having a bottommost surface located above a top surface of said semiconductor material layer; at least one second-type electrode conductively connected to said semiconductor material layer; a plurality of non-uniform electric field regions located in said semiconductor material layer and around said angled corners of said at least one first-type electrode, wherein said at least one first-type electrode is at a first voltage and said at least one second-type electrode is at a second voltage that is different from said first voltage; and a waveguide located underneath said semiconductor material layer and configured to have an evanescent coupling with said semiconductor material layer. ### Claim 8 (depends on 7) The semiconductor structure of claim 7, further comprising a current detection device configured to measure current that flows through said at least one first-type electrode and said at least one second-type electrode. ### Claim 9 (depends on 8) The semiconductor structure of claim 8, wherein said semiconductor material layer is a photosensitive semiconductor material that generates electron-hole pairs upon irradiation by electromagnetic radiation and said semiconductor structure is a photodetector structure. ### Claim 10 A semiconductor structure comprising: a semiconductor material layer having a doping of a same conductivity type throughout and located on a substrate; at least one first-type electrode having angled corners and conductively connected to said semiconductor material layer and having a bottommost surface located above a top surface of said semiconductor material layer; at least one second-type electrode conductively connected to said semiconductor material layer; a plurality of non-uniform electric field regions located in said semiconductor material layer and around said angled corners of said at least one first-type electrode, wherein said at least one first-type electrode is at a first voltage and said at least one second-type electrode is at a second voltage that is different from said first voltage; and a plurality of thin material liners directly contacting a surface of said semiconductor material layer and sidewalls of said at least one first-type electrode, wherein said plurality of thin material liners conduct electricity. ### Claim 11 (depends on 1) The semiconductor structure of claim 1, further comprising: A semiconductor structure comprising: a semiconductor material layer having a doping of a same conductivity type throughout and located on a substrate; at least one first-type electrode having angled corners and conductively connected to said semiconductor material layer and having a bottommost surface located above a top surface of said semiconductor material layer; at least one second-type electrode conductively connected to said semiconductor material layer; a plurality of non-uniform electric field regions located in said semiconductor material layer and around said angled corners of said at least one first-type electrode, wherein said at least one first-type electrode is at a first voltage and said at least one second-type electrode is at a second voltage that is different from said first voltage, at least one third-type electrode conductively connected to said semiconductor material layer; and a current detection device configured to measure electrical current that flows through said at least one third-type electrode and said at least one second-type electrode, wherein said at least one first first-type electrode overlies a portion of said semiconductor layer that includes a path of said current. ### Claim 12 (depends on 11) The semiconductor structure of claim 11, further comprising a device configured to provide a variable voltage bias across said at least one first-type electrode and at least one second-type electrode. ### Claim 13 A method of operating a semiconductor device embodied in a semiconductor structure, said method comprising: providing a semiconductor structure comprising: a semiconductor material layer having a doping of a same conductivity type throughout and located on a substrate; at least one first-type electrode having angled corners and conductively connected to said semiconductor material layer and having a bottommost surface located above a top surface of said semiconductor material layer; at least one second-type electrode conductively connected to said semiconductor material layer; and a plurality of non-uniform electric field regions located in said semiconductor material layer and around said angled corners of said at least one first-type electrode, wherein said at least one first-type electrode is at a first voltage and said at least one second-type electrode is at a second voltage that is different from said first voltage; inducing impact ionization and avalanche multiplication of charge carriers in said semiconductor material layer of said semiconductor structure; and detecting a change in electrical current through a portion of said semiconductor material layer caused by said avalanche amplification. ### Claim 14 (depends on 13) The method of claim 13, further comprising providing a direct current (DC) voltage bias across said at least one first-type electrode and said at least one second-type electrode, and said electrical current flows through said at least one first-type electrode and said at least one second-type electrode. ### Claim 15 (depends on 13) The method of claim 13, further comprising exposing said semiconductor material layer to electromagnetic radiation having an energy that is greater than a band gap of a semiconductor material of said semiconductor material layer, wherein electron-hole pairs are generated in said semiconductor material by said electromagnetic radiation. ### Claim 16 (depends on 13) The method of claim 13, wherein said semiconductor structure further includes a waveguide located underneath said semiconductor material layer and configured to have an evanescent coupling with said semiconductor material layer, and said method further includes transmitting said electromagnetic radiation through said waveguide. ### Claim 17 (depends on 13) The method of claim 13, wherein said semiconductor structure further includes a plurality of thin material layers directly contacting a surface of said semiconductor material layer and sidewalls of said at least one first-type electrode, wherein said electrical current flows through at least one of said plurality of thin material layers. ### Claim 18 (depends on 13) The method of claim 13, wherein said semiconductor structure further includes at least one third-type electrode conductively connected to said semiconductor material layer, and wherein said method includes applying a voltage signal across said at least one first-type electrode and said at least one second-type electrode, and said electrical current flows through said at least one third-type electrode and said at least one second-type electrode, wherein said at least one first first-type electrode is located above a portion of said semiconductor layer that includes a path of said electrical current. ### Claim 19 (depends on 13) The method of claim 13, wherein said semiconductor structure further includes at least one third-type electrode and at least one fourth-type electrode that are conductively connected to said semiconductor material layer, and wherein said method includes applying a voltage signal across said at least one first-type electrode and said at least one second-type electrode, and said electrical current flows through said at least one third-type electrode and said at least one fourth-type electrode, wherein said at least one first first-type electrode and said at least one second-type electrode are located above a portion of said semiconductor layer that includes a path of said electrical current.