Heater control with high-limit thermal safety shutdown
AssigneesMKS Instruments, Inc., Watlow Electronic Manufacturing Company
InventorsYoufan Gu, Jeffrey D. Kiernan, Charles C. Lawhead, William C. Bohlinger, Eric E. Ellis, Curtis A. Foster, James P. Hentges, Mark Louis-Gilmer Hoven, James H. Kreisel, Shawn Leininger, Robert O. Moran, Kurt W. Peterson, Jason R. Powell, Dale T. Wolfe
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