# US 8,541,631 B2 · Surface treatment method for solid material

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- Number: US 8,541,631 B2
- Document ID: US8541631B2
- Status: Granted
- Kind: B2
- Application number: 12/975,931
- Filed: 2010-12-22
- Published: 2011-06-30
- Granted: 2013-09-24
- Earliest claimed: 2009-12-24
- Assignees: Shin-Etsu Chemical Co., Ltd.
- Applicants: Ayumu Kiyomori; Yusuke Itoh; Tohru Kubota
- Inventors: Ayumu Kiyomori; Yusuke Itoh; Tohru Kubota
- Web page: https://patentgrep.com/patent/US8541631B2

## CPC

- H10P 50/00: Etching of wafers, substrates or parts of devices
- C09D 4/00: Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond {; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- C09D: COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR (cosmetics A61K; processes for applying liquids or other fluent materials to surfaces, in general, B05D; staining wood B27K5/02; glazes or vitreous enamels C03C; natural resins, French polish, drying-oils, driers, turpentine, per se, C09F; polishing compositions other than French polish, ski waxes C09G; adhesives or use of materials as adhesives C09J; materials for sealing or packing joints or covers C09K3/10; materials for stopping leaks C09K3/12; processes for the electrolytic or electrophoretic production of coatings C25D)

## Abstract

A solid material is subjected to surface treatment by chemically bonding onto a surface of the solid material a stabilized monofunctional silanol represented by R1R2R3SiOH. R1, R2 and R3 may be the same or different, and each represent a substituent group independently selected from a substituted or unsubstituted, monovalent hydrocarbon group having from 1 to 40 carbon atoms or a substituted or unsubstituted, monovalent heterocyclic group having from 1 to 100 carbon atoms. The monofunctional silanol has a dehydrative self-condensation rate lower than triethylsilanol.

## Claims

### Claim 1

A surface treatment method for the formation of a monolayer for a solid material having hydroxyl group on its surface, comprising chemically bonding a stabilized monofunctional silanol represented by the following formula (1) onto the surface of the solid material without using any catalyst:
R1R2R3SiOH (1)
wherein R1, R2 and R3 may be the same or different and each represent a substituent group independently selected from a substituted or unsubstituted, monovalent hydrocarbon group having from 1 to 40 carbon atoms or a substituted or unsubstituted, monovalent heterocyclic group having from 1 to 100 carbon atoms, with a proviso that the total number of carbons of R1, R2 and R3 is at least ten and the monofunctional silanol represented by the formula (1) has a dehydrative self-condensation rate lower than triethylsilanol, to form an organosilicon monolayer.

### Claim 2 (depends on 1)

The surface treatment method according to claim 1, wherein R1 and R2 are each an isopropyl group.