# US 8,541,606 B2 · Tertiary alcohol derivative, polymer compound and photoresist composition

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,541,606 B2
- Document ID: US8541606B2
- Status: Granted
- Kind: B2
- Application number: 13/328,730
- Filed: 2011-12-16
- Published: 2012-06-14
- Granted: 2013-09-24
- Earliest claimed: 2006-02-17
- Assignees: Kuraray Co., Ltd.
- Applicants: Takashi Fukumoto; Ichihiro Aratani
- Inventors: Takashi Fukumoto; Ichihiro Aratani
- Web page: https://patentgrep.com/patent/US8541606B2

## CPC

- C07D 307/33: in position 2, the oxygen atom being in its keto or unsubstituted enol form
- C07C 403/20: having side-chains substituted by carboxyl groups {or halides, anhydrides, or (thio)esters thereof}
- C07D 407/04: directly linked by a ring-member-to-ring-member bond
- C08F 220/1811: {C10or C11-(Meth)acrylate, e.g. isodecyl (meth)acrylate, isobornyl (meth)acrylate or 2-naphthyl (meth)acrylate}
- C08F 220/283: {and containing one or more carboxylic moiety in the chain, e.g. acetoacetoxyethyl(meth)acrylate}
- G03F 7/0397: {the macromolecular compound having an alicyclic moiety in a side chain}
- C07C 2601/14: The ring being saturated
- C07D: HETEROCYCLIC COMPOUNDS (macromolecular compounds C08)
- C07C: ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C08F: MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A polymer compound for a photoresist composition (a) having a high dissolution rate in a developing solution after exposure and (b) exhibiting little swelling during development. A tertiary alcohol derivative that is a raw material for the polymer compound. A tertiary alcohol that is an intermediate of the tertiary alcohol derivative. The tertiary alcohol is represented by formula (3): wherein R1 and R2 individually represent a linear, branched or cyclic alkylene group having 2 to 9 carbon atoms, which may contain an oxygen atom, and wherein R1 and R2 may together form a ring with a carbon atom to which R1 and R2 are bonded.

## Claims

### Claim 1

A tertiary alcohol represented by formula (3):
wherein R1 and R2 together form a ring comprising 3 to 10 carbon atoms and optionally comprising an oxygen atom.

### Claim 2 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is selected from the group consisting of a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, a cyclohexane ring, a cycloheptane ring, a camphor ring, a norbornane ring, an adamantane ring, a tetrahydrofuran ring and a tetrahydropyran ring.

### Claim 3 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a tetrahydrofuran ring or a tetrahydropyran ring.

### Claim 4 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a cyclopropane ring.

### Claim 5 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a cyclobutane ring.

### Claim 6 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a cyclopentane ring.

### Claim 7 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a cyclohexane ring.

### Claim 8 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a cycloheptane ring.

### Claim 9 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a camphor ring.

### Claim 10 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a norbornane ring.

### Claim 11 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is an adamantane ring.

### Claim 12 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a tetrahydrofuran ring.

### Claim 13 (depends on 1)

The tertiary alcohol of claim 1, wherein the ring is a tetrahydropyran ring.