# US 8,541,523 B2 · Norbornene-type polymers, compositions thereof and lithographic process using such compositions

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- Number: US 8,541,523 B2
- Document ID: US8541523B2
- Status: Granted
- Kind: B2
- Application number: 13/079,240
- Filed: 2011-04-04
- Published: 2011-10-06
- Granted: 2013-09-24
- Earliest claimed: 2010-04-05
- Assignees: Promerus, LLC
- Applicants: Pramod Kandanarachchi; Kazuyoshi Fujita; Steven Smith; Larry F. Rhodes
- Inventors: Pramod Kandanarachchi; Kazuyoshi Fujita; Steven Smith; Larry F. Rhodes
- Web page: https://patentgrep.com/patent/US8541523B2

## CPC

- G03F 7/11: having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)}
- C08F 232/08: having condensed rings (coumarone-indene polymers C08F244/00)
- G03F 7/0046: {with perfluoro compounds, e.g. for dry lithography (G03F7/0048 takes precedence)}
- G03F 7/2041: {in the presence of a fluid, e.g. immersion; using fluid cooling means}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- C08F: MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS

## Abstract

Embodiments in accordance with the present invention provide for non-self imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming top-coat layers for overlying photoresist layers in immersion lithographic process and the process thereof.

## Claims

### Claim 1

A non-self imageable polymer comprising norbornene-type repeating units selected from the group consisting of:

### Claim 2 (depends on 1)

The non-self imageable polymer of claim 1, comprising norbornene-type repeating units of the formula:

### Claim 3 (depends on 2)

The non-self imageable polymer according to claim 2, further comprising norbornene-type repeating units derived from a monomer having the formula:

### Claim 4 (depends on 2)

The non-self imageable polymer according to claim 2, further comprising norbornene-type repeating units derived from a monomer having the formula:

### Claim 5 (depends on 2)

The non-self imageable polymer according to claim 2, further comprising norbornene-type repeating units derived from a monomer having the formula:

### Claim 6 (depends on 2)

The non-self imageable polymer according to claim 2, further comprising norbornene-type repeating units derived from a monomer having the formula:

### Claim 7

A non-self imageable homopolymer consisting of a norbornene-type repeating unit, wherein the repeating units of the polymer are one of the structural formulae selected from the group consisting of:

### Claim 8 (depends on 7)

The non-self imageable homopolymer according to claim 7, wherein the homopolymer consists of norbornene-type repeating units having the structural formula:

### Claim 9 (depends on 7)

The non-self imageable homopolymer according to claim 7, wherein the homopolymer consists of norbornene-type repeating units having the structural formula:

### Claim 10 (depends on 7)

The non-self imageable homopolymer according to claim 7, wherein the polymer is a homopolymer consisting of norbornene-type repeating units having the structural formula:

### Claim 11 (depends on 7)

The non-self imageable homopolymer according to claim 7, wherein the homopolymer consists of norbornene-type repeating units having the structural formula: