# US 8,541,480 B2 · Apparatus and method for modifying physical properties of nanostructure using focused electron beam, and nano-barcode and serial-junction nanowire fabricated thereby

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- Number: US 8,541,480 B2
- Document ID: US8541480B2
- Status: Granted
- Kind: B2
- Application number: 13/104,444
- Filed: 2011-05-10
- Published: 2011-11-17
- Granted: 2013-09-24
- Earliest claimed: 2010-05-11
- Assignees: Korea University Research and Business Foundation
- Applicants: Jinsoo Joo; Young Ki Hong; Dong Hyuk Park; Seong Gi Jo; Min Ho Koo
- Inventors: Jinsoo Joo; Young Ki Hong; Dong Hyuk Park; Seong Gi Jo; Min Ho Koo
- Web page: https://patentgrep.com/patent/US8541480B2

## CPC

- H01J 37/3056: {for microworking, e. g. etching of gratings or trimming of electrical components}
- B82Y 40/00: Manufacture or treatment of nanostructures
- H01J 37/26: Electron or ion microscopes; Electron or ion diffraction tubes
- H01J 37/317: for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation (H01J37/36 takes precedence)
- C08G 2261/3221: containing one or more nitrogen atoms as the only heteroatom, e.g. pyrrole, pyridine or triazole
- H01J 2237/31735: Direct-write microstructures
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- C08G: MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS

## Abstract

According to one embodiment of the present invention, a portion of a light-emitting polymer material or a conductive polymer material can be irradiated with a focused electron beam, so that the physical properties of that portion can be modified. For this purpose, one embodiment of the present invention comprises an apparatus for modifying the physical properties of a nanostructure using a focused electron beam, the apparatus comprising: a nanostructure; a focused electron beam-irradiating unit that serves to irradiate a nanoscale electron beam such that it is focused on the nanostructure; and a focused electron beam-controlling unit that serves to control the irradiation position of the nanoscale electron beam so as to modify the physical property of a portion of the nanostructure.

## Claims

### Claim 1

An apparatus for modifying a physical property of a nanostructure using a focused electron beam, the apparatus comprising:
the nanostructure;
a focused electron beam- irradiating unit that serves to irradiate a nanoscale electron beam so as to be focused on the nanostructure; and
a focused electron beam-controlling unit that serves to control an irradiation position of the nanoscale electron beam so as to modify a physical property of a portion of the nanostructure,
wherein the nanostructure is a nanowire, a nanorod, or nanotube, and the focused electron beam-controlling unit serves to control the irradiation position so that a portion irradiated with the electron beam and a portion not irradiated with the electron beam are formed alternately along the nanowire, a nanorod, or nanotube; or wherein the nanostructure is an inorganic nanolayer, and the focused electron beam-controlling unit serves to control the irradiation position so that the inorganic nanolayer is irradiated with the electron beam to form a two-dimensional pattern.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the nanostructure is a π-conjugated polymer nanostructure or an inorganic nanostructure.

### Claim 3 (depends on 2)

The apparatus of claim 2, wherein the π-conjugated polymer nanostructure is formed of a light-emitting polymer material or a conductive polymer material.

### Claim 4 (depends on 3)

The apparatus of claim 3, wherein the n-conjugated polymer nanostructure is formed of one or more polymers selected from the group consisting of polythiophene, poly(p-phenylenevinylene), polythiophenevinylene, poly(p-phenylene), poly(p-phenylacetylene), and derivatives thereof.

### Claim 5 (depends on 3)

The apparatus of claim 3, wherein the conductive polymer nanostructure is formed of polypyrrole.

### Claim 6 (depends on 2)

The apparatus of claim 2, wherein the inorganic nanostructure is formed of titanium dioxide (TiO2), zinc oxide (ZnO) or silicon dioxide (SiO2).

### Claim 7 (depends on 1)

The apparatus of claim 1, wherein the focused electron beam-irradiating unit is any one of a scanning electron microscope, a transmission electron microscope and an E-beam lithography system.

### Claim 8 (depends on 1)

The apparatus of claim 1, wherein the electron beam has a diameter of 1 nm or more and is focused to a size of 1000 nm or less.

### Claim 9 (depends on 1)

The apparatus of claim 1, wherein the physical property of the nanostructure that is modified is at least one selected from structural properties, photoluminescent properties, lattice defects, doped states and electrical properties.