# US 8,541,325 B2 · Low expansivity, high transmission titania doped silica glass

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- Number: US 8,541,325 B2
- Document ID: US8541325B2
- Status: Granted
- Kind: B2
- Application number: 13/028,472
- Filed: 2011-02-16
- Published: 2011-08-25
- Granted: 2013-09-24
- Earliest claimed: 2010-02-25
- Assignees: Corning Incorporated
- Applicants: Carlos Duran; Kenneth Edward Hrdina; Michael A Mueller
- Inventors: Carlos Duran; Kenneth Edward Hrdina; Michael A Mueller
- Web page: https://patentgrep.com/patent/US8541325B2

## CPC

- C03C 3/06: with more than 90% silica by weight, e.g. quartz {(C03C3/045 takes precedence)}
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 40/00: Manufacture or treatment of nanostructures
- C03B 19/1407: {Deposition reactors therefor}
- C03B 19/1415: {Reactant delivery systems}
- C03B 19/1453: {Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering}
- C03C 4/0071: {for laserable glass}
- C03C 4/0085: {for UV-transmitting glass}
- G03F 1/60: Substrates
- G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
- G03F 7/70958: {Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties}
- C03B 2201/21: doped with molecular hydrogen
- C03B 2201/23: doped with hydroxyl groups
- C03B 2201/42: doped with titanium
- C03C 2201/21: containing molecular hydrogen
- C03C 2201/23: containing hydroxyl groups
- C03C 2201/42: containing titanium
- C03C 2203/40: Gas-phase processes
- C03C 2203/52: Heat-treatment
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

In one embodiment the present disclosure is directed to a silica-titania glass with an internal transmission of >90%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the internal transmission is >93%/cm at wavelengths from 340 nm to 840 nm. In a further embodiment the internal transmission is >95%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the disclosure is directed to a silica-titania glass with an overall transmission through an optic made of the glass is >84% at wavelengths from 340 nm to 840 nm. In another embodiment overall transmission through an optic made of the glass is >86% at wavelengths from 340 nm to 840 nm. In a further embodiment the overall transmission through an optic made of the glass is >88% at wavelengths from 330 nm to 840 nm. In a further embodiment the silica-titania glass has a Ti+3 concentration level [Ti3+] less than 3 ppm by weight.

## Claims

### Claim 1

A silica-titania glass consisting of 7-10 wt. % titania and 90-93 wt. % silica and said glass has an internal transmission of greater than 95%/cm over the wavelength range of 340 nm to 840 nm, a fictive temperature less than 900° C. in combination with greater than 600 ppm [OH] by weight, and said glass having a hydrogen (H2) concentration of less than 2×1017 hydrogen molecules/cm3.

### Claim 2 (depends on 1)

The silica-titania glass according to claim 1, wherein said glass consists of 7.5-8.5 wt. % titania and 91.5-92.5 wt. % silica.

### Claim 3 (depends on 1)

The silica-titania glass according to claim 1, wherein said glass has an expansivity slope at 20° C. of less than 1.5 ppb/° K2.

### Claim 4 (depends on 2)

The silica-titania glass according to claim 2, wherein said glass has an expansivity slope at 20° C. of less than 1.5 ppb/° K2.

### Claim 5 (depends on 1)

The silica-titania glass according to claim 1, wherein said glass has an expansivity slope at 20° C. of less than 1.2 ppb/° K2.

### Claim 6 (depends on 2)

The silica-titania glass according to claim 2, wherein said glass has an expansivity slope at 20° C. of less than 1.2 ppb/° K2.

### Claim 7 (depends on 1)

The silica-titania glass according to claim 1, wherein the silica-titania glass has a Ti+3 concentration level [Ti3+] less than 3 ppm by weight.

### Claim 8 (depends on 2)

The silica-titania glass according to claim 2, wherein the silica-titania glass has a Ti+3 concentration level [Ti3+] less than 3 ppm by weight.

### Claim 9 (depends on 1)

The silica-titania glass according to claim 1, wherein said glass has an internal transmission of greater than 95%/cm in the wavelength range of 330 nm to 840 nm.

### Claim 10 (depends on 2)

The silica-titania glass according to claim 2, wherein said glass has an internal transmission of greater than 95%/cm in the wavelength range of 330 nm to 840 nm.

### Claim 11 (depends on 2)

The silica-titania glass according to claim 2, wherein said glass has a fictive temperature of less than 890° C. in combination with greater than 600 ppm [OH] by weight.

### Claim 12 (depends on 2)

The silica-titania glass according to claim 2, wherein said glass has a fictive temperature of less than 880° C. in combination with greater than 600 ppm [OH] by weight.

### Claim 13

A silica-titania glass consisting of 7-10 wt. % titania and 90-93 wt. % silica and said glass has an internal transmission of greater than 95%/cm in the wavelength range of 340 nm to 840 nm, a fictive temperature less than 900° C. in combination with greater than 600 ppm a [OH] by weight, and said glass having a hydrogen (H2) concentration of less than 2×1016 hydrogen molecules/cm3.

### Claim 14

A silica-titania glass consisting of 7-10 wt. % titania and 90-93 wt. % silica and said glass has an internal transmission of greater than 95%/cm in the wavelength range of 340 nm to 840 nm, a fictive temperature less than 900° C. in combination with greater than 600 ppm [OH] by weight, and said glass having a hydrogen (H2) concentration of less than 0.1×1017 hydrogen molecules/cm3.

### Claim 15 (depends on 1)

An optic comprising the glass of claim 1.
