# US 8,541,309 B2 · Processing assembly for semiconductor workpiece and methods of processing same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,541,309 B2 - Document ID: US8541309B2 - Status: Granted - Kind: B2 - Application number: 12/960,372 - Filed: 2010-12-03 - Published: 2012-06-07 - Granted: 2013-09-24 - Earliest claimed: 2010-12-03 - Assignees: Applied Materials, Inc. - Applicants: Jason Rye; Kyle M. Hanson - Inventors: Jason Rye; Kyle M. Hanson - Web page: https://patentgrep.com/patent/US8541309B2 ## CPC - H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - H10P 72/7626: {characterised by the construction of the shaft} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A processing assembly for a semiconductor workpiece generally includes a rotor assembly capable of spinning a workpiece, a chemistry delivery assembly for delivering chemistry to the workpiece, and a chemistry collection assembly for collecting spent chemistry from the workpiece. The chemistry collection assembly includes a weir assembly surrounding the rotor assembly and having a plurality of weirs. Methods for processing a semiconductor workpiece generally include moving at least one of the rotor assembly and the weir assembly. ## Claims ### Claim 1 A processing assembly for a semiconductor workpiece, the processing assembly comprising: (a) a rotor assembly capable of spinning a workpiece, wherein the rotor assembly includes first and second rotors; (b) a chemistry delivery assembly for delivering chemistry to the workpiece; and (c) a chemistry collection assembly for collecting spent chemistry from the workpiece, wherein the chemistry collection assembly includes a weir assembly surrounding the rotor assembly and having a plurality of weirs. ### Claim 2 (depends on 1) The processing assembly of claim 1, wherein the first rotor includes a first workpiece receiving portion and the second rotor includes a second workpiece receiving portion. ### Claim 3 (depends on 2) The processing assembly of claim 2, wherein the first rotor is a chuck rotor and the second rotor is a centering rotor. ### Claim 4 (depends on 2) The processing assembly of claim 2, wherein the first and second rotors are capable of nesting with each other. ### Claim 5 (depends on 2) The processing assembly of claim 2, wherein the first rotor includes a vortex cavity for maintaining the workpiece on either of the first or second rotors. ### Claim 6 (depends on 2) The processing assembly of claim 2, wherein the first rotor is capable of moving to at least first and second positions. ### Claim 7 (depends on 1) The processing assembly of claim 1, wherein the rotor assembly is movable to provide a first workpiece receiving portion at a first axial position and a second workpiece receiving portion at a second axial position. ### Claim 8 (depends on 1) The processing assembly of claim 1, wherein the weir assembly is capable of moving to a plurality of positions to align one of the plurality of weirs with the rotor assembly for collecting spent chemistry from the workpiece. ### Claim 9 (depends on 1) The processing assembly of claim 1, wherein the weir assembly includes first, second, and third weirs. ### Claim 10 (depends on 1) The processing assembly of claim 1, wherein at least one of the plurality of weirs is designed to minimize chemistry splash. ### Claim 11 (depends on 1) The processing assembly of claim 1, wherein the weir assembly includes an inflatable seal to minimize chemistry leakage from at least one of the plurality of weirs. ### Claim 12 (depends on 1) The processing assembly of claim 1, wherein the rotor assembly includes a transmission assembly including a polymer coupling for transmitting torque. ### Claim 13 A method of processing a semiconductor workpiece, the method comprising: (a) receiving a workpiece in a processing assembly, wherein the processing assembly includes a rotor assembly for rotating the workpiece, a chemistry delivery assembly, and a chemistry collection assembly including a weir assembly, wherein the rotor assembly is capable of moving to at least first and second axial positions to process the workpiece; (b) moving the weir assembly from a first position to a second position; (c) processing the workpiece when the weir assembly is in the second position; (d) moving the weir assembly from the second position to a third position; and (e) processing the workpiece when the weir assembly is in the third position. ### Claim 14 (depends on 13) The method of claim 13, further comprising moving at least one of the rotor assembly and the chemistry collection assembly, and processing the workpiece. ### Claim 15 (depends on 13) The method of claim 13, wherein the rotor assembly includes a vortex cavity for maintaining the workpiece on the rotor assembly. ### Claim 16 (depends on 13) The method of claim 13, wherein processing is selected from the group consisting of a back side etching process, a bevel etching process, and a rinsing process. ### Claim 17 A method of processing a semiconductor workpiece, the method comprising: (a) receiving a workpiece in a processing assembly, wherein the processing assembly includes a rotor assembly for rotating the workpiece, a chemistry delivery assembly, and a chemistry collection assembly including a weir assembly having first and second weirs; (b) processing the workpiece when the rotor assembly is in a first axial position, including delivering a first chemistry to the workpiece and collecting the spent first chemistry in a first weir; (c) moving the rotor assembly from the first axial position to a second axial position; and (d) processing the workpiece in the second axial position, including delivering a second chemistry to the workpiece and separately collecting the spent second chemistry in a second weir. ### Claim 18 A processing assembly for a semiconductor workpiece, the processing assembly comprising: (a) a rotor assembly capable of spinning a workpiece, wherein the rotor assembly includes first and second workpiece receiving portions, and wherein the rotor assembly is movable to provide a first workpiece receiving portion at a first axial position and a second workpiece receiving portion at a second axial position; (b) a chemistry delivery assembly for delivering chemistry to the workpiece; and (c) a chemistry collection assembly for collecting spent chemistry from the workpiece, wherein the chemistry collection assembly includes a weir assembly surrounding the rotor assembly and having a plurality of weirs. ### Claim 19 A processing assembly for a semiconductor workpiece, the processing assembly comprising: (a) a rotor assembly capable of spinning a workpiece, wherein the rotor assembly is capable of moving to at least a first axial position for processing the workpiece and a second axial position for processing the workpiece; (b) a chemistry delivery assembly for delivering chemistry to the workpiece; and (c) a chemistry collection assembly for collecting spent chemistry from the workpiece, wherein the chemistry collection assembly includes a weir assembly surrounding the rotor assembly and having first, second, and third weirs. ### Claim 20 A processing assembly for a semiconductor workpiece, the processing assembly comprising: (a) a rotor assembly capable of spinning a workpiece, wherein the rotor assembly includes a transmission assembly including a polymer coupling for transmitting torque; (b) a chemistry delivery assembly for delivering chemistry to the workpiece; and (c) a chemistry collection assembly for collecting spent chemistry from the workpiece, wherein the chemistry collection assembly includes a weir assembly surrounding the rotor assembly and having a plurality of weirs. ### Claim 21 A processing assembly for a semiconductor workpiece, the processing assembly comprising: (a) a rotor assembly capable of spinning a workpiece, wherein the rotor assembly is capable of moving to at least a first axial position for processing the workpiece and a second axial position for processing the workpiece; (b) a chemistry delivery assembly for delivering at least first and second chemistries to the workpiece; and (c) a chemistry collection assembly for collecting spent chemistry from the workpiece, wherein the chemistry collection assembly includes a weir assembly surrounding the rotor assembly and having a plurality of weirs that allows for the separate collection using separate channels of the at least first and second chemistries used during processing. ### Claim 22 A method of processing a semiconductor workpiece, the method comprising: (a) receiving a workpiece in a processing assembly, wherein the processing assembly includes a rotor assembly, a chemistry delivery assembly, and a chemistry collection assembly including a weir assembly; (b) spinning the workpiece on the rotor assembly; (c) moving the weir assembly from a first position to a second position and processing the workpiece when the weir assembly is in the second position; and (d) moving the rotor assembly from a first axial position to a second axial position and processing the workpiece when the rotor assembly is in the second position and the weir assembly is in the second position. ### Claim 23 A method of processing a semiconductor workpiece, the method comprising: (a) receiving a workpiece in a processing assembly, wherein the processing assembly includes a rotor assembly, a chemistry delivery assembly, and a chemistry collection assembly including a weir assembly; (b) rotating the rotor assembly using a transmission assembly including a polymer coupling for transmitting torque; and (c) moving the weir assembly from a first position to a second position and processing the workpiece when the weir assembly is in the second axial position.