# US 8,541,066 B2 · Light-induced directed self-assembly of periodic sub-wavelength nanostructures

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- Number: US 8,541,066 B2
- Document ID: US8541066B2
- Status: Granted
- Kind: B2
- Application number: 12/323,729
- Filed: 2008-11-26
- Published: 2009-08-27
- Granted: 2013-09-24
- Earliest claimed: 2007-11-26
- Assignees: The University of North Carolina at Charlotte
- Applicants: Tsing-Hua Her; Haitao Zhang; Mingzhen Tang
- Inventors: Tsing-Hua Her; Haitao Zhang; Mingzhen Tang
- Web page: https://patentgrep.com/patent/US8541066B2

## CPC

- C23C 16/047: {using irradiation by energy or particles}
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- C23C 16/16: from metal carbonyl compounds
- C23C 16/483: {using coherent light, UV to IR, e.g. lasers}
- G11B 7/0045: Recording (G11B7/006, G11B7/0065 take precedence)
- G11B 7/0065: Recording, reproducing or erasing by using optical interference patterns, e.g. holograms
- G11B 7/083: {relative to record carriers storing information in the form of optical interference patterns, e.g. holograms}
- G11B 2007/13727: {Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing}
- Y10T 428/12: All metal or with adjacent metals
- Y10T 428/31678: Of metal
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

In various exemplary embodiments, the present invention provides a system for the light-induced directed self-assembly (LIDSA) of periodic sub-wavelength nanostructures, including: a light source for delivering a beam of photons; a reaction chamber disposed adjacent to the light source; a gas including one or more precursor materials disposed within the reaction chamber; and a substrate disposed within the reaction chamber, wherein the substrate is positioned and configured to receive the beam of photons; wherein the beam of photons causes a periodic sub-wavelength nanostructure of one or more constituents of the one or more precursor materials to form on a surface of the substrate. In various exemplary embodiments, the present invention also provides an associated method.

## Claims

### Claim 1

A method for the light-induced directed self-assembly of periodic sub-wavelength nanostructures, comprising:
providing a light source for delivering a single beam of photons;
providing a reaction chamber disposed adjacent to the light source;
providing a gas comprising one or more precursor materials disposed within the reaction chamber; and
providing a substrate disposed within the reaction chamber, wherein the substrate is positioned and configured to receive the single beam of photons directed to the substrate from the light source;
wherein the single beam of photons causes a periodic sub-wavelength nanostructure of one or more constituents of the one or more precursor materials to form on a surface of the substrate within an area of exposure to the single beam of photons parallel to a laser polarization of the single beam of photons via a light-induced directed self-assembly mechanism prior to any translation of the light source or the substrate.

### Claim 2 (depends on 1)

The method of claim 1, wherein the light source comprises one of a femtosecond and a picosecond pulsed laser.

### Claim 3 (depends on 1)

The method of claim 1, wherein the light source comprises a peak power of between about 10 GW/cm2 and about 500 GW/cm2.

### Claim 4 (depends on 1)

The method of claim 1, wherein the light source comprises a wavelength of between about 200 nm and about 800 nm.

### Claim 5 (depends on 1)

The method of claim 1, wherein the reaction chamber comprises a vacuum chamber.

### Claim 6 (depends on 1)

The method of claim 1, wherein the substrate comprises one of a metal, a semiconductor, and an insulator.

### Claim 7 (depends on 1)

The method of claim 1, wherein the beam of photons interacts with the surface of the substrate on a spot having a diameter of between about 200 nm and about 1 mm.

### Claim 8 (depends on 1)

The method of claim 1, wherein the beam of photons interacts with the surface of the substrate for a period of time between about 0.1 sec and about 10 sec or at a scanning speed of about 0.1 μm/sec and about 100 μm/sec.

### Claim 9 (depends on 1)

The method of claim 1, wherein the periodic sub-wavelength nanostructure comprises a feature size of λ/5 or smaller, wherein λ is the wavelength of the beam of photons.

### Claim 10 (depends on 1)

The method of claim 1, further comprising providing a translation stage coupled to one or more of the light source and the reaction chamber for selectively translating the substrate with respect to the beam of photons.

### Claim 11 (depends on 1)

The method of claim 1, wherein the periodic sub-wavelength nanostructure is used to form one of a polarizer, an integrated optical element, an optical interconnect, a tagging feature, a field enhancement structure, a patterned nano-catalyst, a nano-electrode, and a nano-magnet.