# US 8,540,913 B2 · Methods for manufacturing three-dimensional devices and devices created thereby > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,540,913 B2 - Document ID: US8540913B2 - Status: Granted - Kind: B2 - Application number: 11/930,274 - Filed: 2007-10-31 - Published: 2008-03-06 - Granted: 2013-09-24 - Earliest claimed: 2001-06-05 - Assignees: Mikro Systems, Inc. - Applicants: Michael P. Appleby; Iain Fraser; James E. Atkinson - Inventors: Michael P. Appleby; Iain Fraser; James E. Atkinson - Web page: https://patentgrep.com/patent/US8540913B2 ## CPC - B23P 15/246: {Laminated dies} - A61B 6/502: {for diagnosis of breast, i.e. mammography} - B22D 19/00: Casting in, on, or around objects which form part of the product (B22D23/04 takes precedence; alumino-thermic welding B23K23/00; coating by casting molten material on the substrate C23C6/00) - B22D 29/00: Removing castings from moulds, not restricted to casting processes covered by a single main group; Removing cores; Handling ingots {(B22D13/10, B22D11/124, B22D17/00 take precedence)} - B28B 7/20: Moulds for making shaped articles with undercut recesses, e.g. dovetails - B28B 7/24: Unitary mould structures with a plurality of moulding spaces {, e.g. moulds divided into multiple moulding spaces by integratable partitions, mould part structures providing a number of moulding spaces in mutual co-operation (assemblies of individually complete moulds B28B7/26)} - B29C 33/0088: {Multi-face stack moulds} - B29C 33/12: with incorporated means for positioning inserts, e.g. labels {(positioning reinforcements B29C70/541)} - B29C 33/302: {Assembling a large number of mould elements to constitute one cavity} - B29C 33/3842: {Manufacturing moulds, e.g. shaping the mould surface by machining} - B29C 33/42: characterised by the shape of the moulding surface, e.g. ribs or grooves - B29C 33/424: {Moulding surfaces provided with means for marking or patterning (for injection moulding B29C45/372)} - B29C 33/44: with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles - B29C 39/021: {by casting in several steps} - B29C 39/34: for undercut articles - B29C 39/36: Removing moulded articles - B29C 69/001: {a shaping technique combined with cutting, e.g. in parts or slices combined with rearranging and joining the cut parts (for reinforced material B29C70/545; B29C49/4278, B29C51/268 take precedence)} - G01T 1/20: with scintillation detectors - G01T 7/00: Details of radiation-measuring instruments - G03F 7/0017: {for the production of embossing, cutting or similar devices; for the production of casting means} - G21K 1/02: using diaphragms, collimators - A61B 6/4258: {for detecting non x-ray radiation, e.g. gamma radiation (A61B6/037 takes precedence)} - B29C 48/12: Articles with an irregular circumference when viewed in cross-section, e.g. window profiles - B29K 2083/00: Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as moulding material - B29L 2031/756: {Microarticles, nanoarticles} - Y10T 428/31: Surface property or characteristic of web, sheet or block - B23P: METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS (arrangements for copying or controlling B23Q) - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) - B22D: CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES (shaping of plastics or substances in a plastic state B29C; metallurgical processing, selection of substances to be added to metal C21, C22) - B28B: SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER (foundry moulding B22C; working stone or stone-like material B28D; shaping of substances in a plastic state, in general B29C; making layered products not composed wholly of these substances B32B) - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G21K: HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES - B29K: INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR {MOULDS, } REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS - B29L: INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract In certain exemplary embodiments of the present invention, three-dimensional micro-mechanical devices and/or micro-structures can be made using a production casting process. As part of this process, an intermediate mold can be made from or derived from a precision stack lamination and used to fabricate the devices and/or structures. Further, the micro-devices and/or micro-structures can be fabricated on planar or nonplanar surfaces through use of a series of production casting processes and intermediate molds. The use of precision stack lamination can allow the fabrication of high aspect ratio structures. Moreover, via certain molding and/or casting materials, molds having cavities with protruding undercuts also can be fabricated. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. This abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. ## Claims ### Claim 1 A method of forming a casting, comprising: filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a sandwiched cavity, said stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and demolding the first cast product from the mold, the first cast product reflecting the sandwiched cavity said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers. ### Claim 2 A method of forming a casting, comprising: filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a feature having an aspect ratio greater than 25:1, said stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and demolding the first cast product from the mold, the first cast product reflecting the feature said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers. ### Claim 3 (depends on 2) The method of claim 2, wherein: the feature is an isotropic wall. ### Claim 4 (depends on 2) The method of claim 2, wherein: the feature is a sub-cavity. ### Claim 5 (depends on 2) The method of claim 2, wherein: the feature is a sub-cavity in fluid communication with an outer edge of a layer of the mold. ### Claim 6 A method of forming a plurality of castings, comprising: repetitively: filling a mold having a stacked plurality of micro-machined foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of micro-machined foil layers defining a protruding undercut; and demolding the first cast product from the mold without damage to either the first cast product or the mold. ### Claim 7 (depends on 6) The method of claim 6, wherein: the first cast product reflects the protruding undercut. ### Claim 8 (depends on 6) The method of claim 6, wherein: the micro-machined layers are lithographically-derived. ### Claim 9 (depends on 6) The method of claim 6, wherein: the micro-machined layers are non-lithographically-derived. ### Claim 10 (depends on 6) The method of claim 6, wherein: the micro-machined layers are formed via laser machining. ### Claim 11 (depends on 6) The method of claim 6, wherein: the micro-machined layers are formed via ion etching. ### Claim 12 (depends on 6) The method of claim 6, wherein: the micro-machined layers are formed via electroplating. ### Claim 13 (depends on 6) The method of claim 6, wherein: the micro-machined layers are formed via vapor deposition. ### Claim 14 (depends on 6) The method of claim 6, wherein: the micro-machined layers are formed via bulk micro-machining. ### Claim 15 (depends on 6) The method of claim 6, wherein: the micro-machined layers are formed via surface micro-machining. ### Claim 16 (depends on 6) The method of claim 6, wherein: the micro-machined layers are formed via conventional machining. ### Claim 17 (depends on 6) The method of claim 6, wherein: the mold is reusable. ### Claim 18 (depends on 6) The method of claim 6, wherein: the first cast product is demolded from the mold such that the mold is not substantially damaged. ### Claim 19 A method of forming a casting, comprising: without damage to either the first cast product or the mold, demolding a first cast product from a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers that define a feature having an aspect ratio greater than 25:1, the first cast product reflecting the feature, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut. ### Claim 20 A method of forming a casting, comprising: without damage to either the first cast product or the mold, demolding a first cast product from a mold having a stacked plurality of micro-machined foil layers that define a protruding undercut and a feature having an aspect ratio of greater than 10:1, the first case product reflecting the protruding undercut and the feature.