# US 8,539,854 B2 · Microrobots with large actuation volumes, and controllers, systems, and methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,539,854 B2 - Document ID: US8539854B2 - Status: Granted - Kind: B2 - Application number: 12/587,314 - Filed: 2009-10-05 - Published: 2010-05-27 - Granted: 2013-09-24 - Earliest claimed: 2008-10-06 - Assignees: Board of Regents, The University of Texas System - Applicants: Dan O. Popa; Rakesh Murthy - Inventors: Dan O. Popa; Rakesh Murthy - Web page: https://patentgrep.com/patent/US8539854B2 ## CPC - B25J 7/00: Micromanipulators {(specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20)} - B25J 9/0015: {Flexure members, i.e. parts of manipulators having a narrowed section allowing articulation by flexion} - B25J 9/104: {with cables, chains or ribbons} - Y10T 74/20305: Robotic arm - Y10T 74/20323: including flaccid drive element - Y10T 74/20348: Planar surface with orthogonal movement and rotation - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract Robots, and atomic force microscopes including robots, that utilize in-plane actuators to provide large out-of-plane working volumes and forces. ## Claims ### Claim 1 A robot comprising: a first actuator drive having a first shuttle and one or more in-plane actuators coupled to the first shuttle, the first actuator drive configured such that the one or more actuators are actuatable to move the first shuttle along a first plane; an arm having a base portion and a cantilever portion movably coupled to and extending from the base portion, the base portion coupled in fixed relation to the first shuttle of the first actuator drive; a second actuator drive having a second shuttle and one or more in-plane actuators coupled to the second shuttle, the second actuator drive configured such that the one or more actuators are actuatable to move the second shuttle along a second plane; a cable having a first end coupled to the second shuttle of the second actuator drive and a second end coupled to the cantilever portion of the arm. ### Claim 2 (depends on 1) The robot of claim 1, where the second plane is substantially parallel to the first plane. ### Claim 3 (depends on 2) The robot of claim 2, where the second plane is substantially coplanar with the first plane. ### Claim 4 (depends on 3) The robot of claim 3, where the arm is substantially perpendicular to the first plane, and the arm is coupled to the first shuttle with a snap fastener. ### Claim 5 (depends on 1) The robot of claim 1, where the robot is configured such that first and second actuator drives are actuatable to: (i) translate the base portion of the arm along the first plane; and (ii) pivot the cantilever portion of the arm relative to the base portion of the arm. ### Claim 6 (depends on 5) The robot of claim 5, where the robot is configured such that the first and second actuator drives are actuatable to: (i) translate the base portion of the arm in at least two directions along the first plane; and (ii) pivot the cantilever portion of the arm relative to the base portion of the arm around at least two axes of rotation. ### Claim 7 (depends on 6) The robot of claim 6, where the maximum dimensions of the robot do not exceed 3.2 millimeters (mm)×2.2 mm×1.2 mm, the cantilever portion of the arm comprises an end effector, and the robot is configured such that the actuator drives are actuatable to move the end effector laterally by at least 40 micrometers (μm), longitudinally by at least 40 μm, and vertically by at least 50 μm. ### Claim 8 (depends on 7) The robot of claim 7, where the maximum dimensions of the robot do not exceed 3 mm×2 mm×1 mm. ### Claim 9 (depends on 7) The robot of claim 7, where the robot is configured such that the actuator drives can be actuated to cause the end effector to apply at least 40 milliNewtons (mN) of force to an object in a direction substantially parallel to the first plane. ### Claim 10 (depends on 9) The robot of claim 9, where the robot is configured such that the actuator drives can be actuated to cause the end effector to apply at least 20 mN of force to an object in a direction substantially perpendicular to the first plane. ### Claim 11 (depends on 1) The robot of claim 1, where one or more in-plane actuators of the first actuator drive comprise: a first actuator configured to be actuated along a first axis; a second actuator configured to be actuated along a second axis that is substantially perpendicular to the first axis. ### Claim 12 (depends on 11) The robot of claim 11, where the one or more in-plane actuators of the second actuator drive comprise: a third actuator configured to be actuated along a third axis that is substantially parallel to the first axis; a fourth actuator configured to be actuated along a fourth axis that is substantially parallel to the second axis. ### Claim 13 (depends on 12) The robot of claim 12, where the actuators of the first and second actuator drives comprise electrothermal chevron actuators. ### Claim 14 (depends on 1) The robot of claim 1, where the cantilever portion of the arm is coupled to the base portion of the arm with a two-axis flexure. ### Claim 15 (depends on 1) The robot of claim 1, where the cantilever portion, base portion, and flexure of the arm are of unitary construction. ### Claim 16 (depends on 1) The robot of claim 1, where the cable has a diameter between 20 μm and 40 μm. ### Claim 17 (depends on 16) The robot of claim 16, where the cable has a diameter between 25 μm and 35 μm. ### Claim 18 A robot comprising: a first actuator drive having a first shuttle and two in-plane actuators coupled to the first shuttle, the first actuator drive configured such that the actuators are actuatable to move the first shuttle along a first plane; an arm having a base portion and a cantilever portion movably coupled to and extending from the base portion, the base portion coupled in fixed relation to the first shuttle of the first actuator drive; a second actuator drive having a second shuttle and two in-plane actuators coupled to the second shuttle, the second actuator drive configured such that the actuators are actuatable to move the second shuttle along the first plane; a cable having a first end coupled to the second shuttle of the second actuator drive and a second end coupled to the cantilever portion of the arm; where the maximum dimensions of the robot do not exceed 3.2 mm×2.2 mm×1.2 mm, the cantilever portion of the arm comprises an end effector, and the robot is configured such that the actuator drives are actuatable along the first plane to move the move the end effector laterally by at least 40 μm, longitudinally by at least 40 μm, and vertically by at least 50 μm. ### Claim 19 An atomic force microscope comprising: a robot comprising: a first actuator drive having a first shuttle and one or more in-plane actuators coupled to the first shuttle, the first actuator drive configured such that the one or more actuators are actuatable to move the first shuttle along a first plane; an arm having a base portion and a cantilever portion movably coupled to and extending from the base portion, the base portion coupled in fixed relation to the first shuttle of the first actuator drive, the cantilever portion having a distal end with a probe tip; a second actuator drive having a second shuttle and one or more in-plane actuators coupled to the second shuttle, the second actuator drive configured such that the one or more actuators are actuatable to move the second shuttle along a second plane; a cable having a first end coupled to the second shuttle of the second actuator drive and a second end coupled to the cantilever portion of the arm; and a detector module coupled to the robot for sensing the position of the probe tip.