# US 8,539,835 B2 · Low inertia frame for detecting coriolis acceleration

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- Number: US 8,539,835 B2
- Document ID: US8539835B2
- Status: Granted
- Kind: B2
- Application number: 13/427,784
- Filed: 2012-03-22
- Published: 2012-08-30
- Granted: 2013-09-24
- Earliest claimed: 2008-09-12
- Assignees: InvenSense, Inc.
- Applicants: Joseph Seeger; Bruno Borovic
- Inventors: Joseph Seeger; Bruno Borovic
- Web page: https://patentgrep.com/patent/US8539835B2

## CPC

- G01C 19/5719: using planar vibrating masses driven in a translation vibration along an axis
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)

## Abstract

A sensing frame is disclosed. The sensing frame includes a first rail and a second rail. The first and second rails are constrained to move along a first axis parallel to the first and second rails. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. First and second guiding arms are flexibly coupled to the first rail and second rail. The first guiding arm is flexibly suspended to the base at first anchoring points for allowing rotation of the first guiding arm, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm. The sensing frame includes a plurality of coupling flexures and a transducer for sensing motion of the first and second rails.

## Claims

### Claim 1

A sensor responsive to motion comprising:
a base;
a proof mass for generating a torque in response to motion of the sensor;
a sensing frame disposed in a plane coupled to the proof mass, where in the sensing frame moves in response to the torque, the sensing frame comprising:
a first rail, constrained to move along a first axis in the plane;
a second rail substantially parallel to the first rail, the second rail constrained to move along the first axis;
at least two guiding arms for ensuring the first rail and the second rail to move in anti-phase fashion along the first axis;
a first guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail;
a second guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail;
the first guiding arm flexibly suspended to the base at a first anchoring point allowing rotation of the first guiding arm around a second axis that is perpendicular to the first axis and normal to the plane;
the second guiding arm flexibly suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis; and
a transducer for sensing motion of the first and second rails along the first axis.

### Claim 2 (depends on 1)

The sensor of claim 1 wherein the proof mass is driven into oscillation.

### Claim 3 (depends on 1)

The sensor of claim 1 wherein the proof-mass is responsive to angular velocity of the sensor.

### Claim 4 (depends on 1)

The sensor of claim 1 wherein the proof-mass is responsive to rotation of the sensor.

### Claim 5 (depends on 1)

The sensor of claim 1 wherein the proof-mass is responsive to linear acceleration of the sensor.

### Claim 6 (depends on 1)

The sensor of claim 1 wherein a plurality of coupling flexures connect the proof mass to the first rail and the second rail.

### Claim 7 (depends on 1)

The sensor of claim 1 wherein a plurality of coupling flexures connecting the proof mass to the first and the second guiding arms.

### Claim 8 (depends on 1)

The sensor claim 1 wherein:
the first anchoring point is shared with at least one anchoring point of the proof mass; and
the second anchoring point is shared with at least one anchoring point of the proof mass.

### Claim 9 (depends on 1)

The sensor of claim 1 wherein the first rail and the second rail support a movable part of the transducer.

### Claim 10 (depends on 1)

The sensor of claim 1 wherein the transducer is selected from the group consisting of capacitive sensors, electromagnetic sensors, piezoelectric sensors, and piezoresistive sensors.