Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications
AssigneeCornell University
InventorsAmit Lal, Serhan M. Ardanuc
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Abstract
A system (120) for reflecting or redirecting incident light, microwave or sound energy includes a first substrate (144) configured to support an array of reflective elements (130) that can be angularly displaced through a range of substantially (90) degrees in response to a reflector angle control signal and a controller programmed to generate the reflector angle control signal to achieve desired incident energy, beam or wavefront redirection. The reflective elements (130) preferably comprise MEMS micro-reflector elements hingedly or movably attached to the first substrate (130) and define a reflective surface that is aimed at the source of incident light, microwave or sound energy.
Claims8
A system for reflecting or redirecting incident light, microwave or sound energy, comprising:
- (a) a first substrate configured to hingedly support a large tilt angle micromirror array comprising a plurality of reflective elements that are adapted to be angularly displaced through a range of substantially 90 degrees in response to a reflector angle control signal;
- (b) a central or remote controller programmed to generate said reflector angle control signal to achieve a selected incident energy beam or wavefront redirection;
- (c) wherein said reflective elements comprise MEMS minor elements hingedly attached to said first substrate at a proximal edge and defining a reflective surface with a distal edge opposite said proximal edge;
- (d) wherein said MEMS minor elements each carry a central hinge positioned between said proximal edge and said distal edge, said central hinge being configured to hingedly retain a tail member having a hinge end opposite a movable base;
- (e) and wherein said first substrate also includes a slider rail region for each mirror element tail member, said slider region being configured to slidably receive, engage and support said mirror element tail member in one of a selected plurality of tail member positions, such that each mirror element tail member position within said substrate's slider region corresponds with a defined mirror element angular displacement.
A system for reflecting or redirecting incident light, microwave or sound energy, comprising:
- (a) a first substrate configured to hingedly support a large tilt angle micro-reflector array comprising a plurality of reflective elements that are adapted to be angularly displaced through a range of substantially 90 degrees in response to a reflector angle control signal;
- (b) a central or remote controller programmed to generate said reflector angle control signal to achieve a selected incident energy beam or wavefront redirection;
- (c) wherein said reflective elements comprise MEMS micro-reflector elements hingedly attached to said first substrate at a proximal edge and defining a reflective surface with a distal edge opposite said proximal edge;
- (d) wherein said MEMS micro-reflector elements each carry a central hinge positioned between said proximal edge and said distal edge, said central hinge being configured to hingedly retain a tail member having a hinge end opposite a movable base;
- (e) and wherein said first substrate also includes a slider rail region for each micro-reflector element tail member, said slider region being configured to slidably receive, engage and support said micro-reflector element tail member in one of a selected plurality of tail member positions, such that each micro-reflector element tail member position within said substrate's slider region corresponds with a defined micro-reflector element angular displacement.
Dependencies are inferred from the claim text.