Metal mesh lid MEMS package and method
AssigneeAmkor Technology, Inc.
InventorsBob Shih-Wei Kuo, Russell Shumway, Louis B. Troche, Jr.
Life of this patent
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Abstract
A metal mesh lid MEMS package includes a substrate, a MEMS electronic component coupled to the substrate, and a metal mesh lid coupled to the substrate with a lid adhesive. The metal mesh lid includes a polymeric lid body having a top port formed therein and a metal mesh cap coupled to the lid body. The metal mesh cap covers the top port and serves as both a particulate filter and a continuous conductive shield for EMI/RF interferences. Further, the metal mesh cap provides a locking feature for the lid adhesive to maximize the attach strength of the metal mesh lid to the substrate.
Claims20
A package comprising:
- a substrate;
- a Micro Electro Mechanical Systems (MEMS) electronic component coupled to the substrate;
- and a metal mesh lid coupled to the substrate, the metal mesh lid comprising:
- a lid body having a top port formed therein;
- a metal mesh cap coupled to the lid body, wherein the metal mesh cap covers the top port;
- a lid plate parallel to the substrate;
- and lid sidewalls extending perpendicularly from the lid plate and terminating at a lid base of the metal mesh lid, wherein the metal mesh cap is bent at the lid base and is exposed at the entire lid base.
A method comprising:
- forming a metal mesh cap array comprising metal mesh caps;
- and coupling the metal mesh cap array to a lid body array comprising lid bodies having top ports formed therein such that the metal mesh caps cover the top ports, wherein the metal mesh cap array and the lid body array collectively form a metal mesh lid array comprising metal mesh lids, the metal mesh lids comprising:
- lid plates;
- lid sidewalls extending perpendicularly from the lid plates and terminating at lid bases of the metal mesh lids, wherein the metal mesh caps are bent at the lid bases and are exposed at the entire lid bases.
A method comprising:
- forming a metal mesh cap array comprising metal mesh caps;
- and
- coupling the metal mesh cap array to a lid body array comprising lid bodies having top ports formed therein such that the metal mesh caps cover the top ports comprising:
- applying top port plugs to the metal mesh cap array at top port hole areas;
- forming the lid body array on the metal mesh cap array;
- and
- removing the top port plugs to form the top ports in the lid body array.
A method comprising:
- forming a lid body array comprising lid bodies having top ports formed therein;
- and simultaneously forming and bonding a metal mesh cap array to the lid body array, the metal mesh cap array comprising metal mesh caps covering the top ports, wherein the metal mesh cap array and the lid body array collectively form a metal mesh lid array comprising metal mesh lids, the metal mesh lids comprising:
- lid plates;
- lid sidewalls extending perpendicularly from the lid plates and terminating at lid bases of the metal mesh lids, wherein the metal mesh caps are bent at the lid bases and are exposed at the entire lid bases.
Dependencies are inferred from the claim text.