Position resolved measurement apparatus and a method for acquiring space coordinates of a quantum beam incident thereon

A position resolved measurement apparatus for acquiring a position information of an irradiation position of a quantum beam incident thereon, the apparatus comprising:

• a position sensitive detector (1);
• an irradiation source (6);
• means for measuring the response of detector (1) generated upon irradiation by irradiation source (6);
• wherein
• an artificial neural network structure (7) is provided such that the measured detector response is the input to the artificial neural network structure (7) and the initial space coordinates of irradiation are the output of the artificial neural network structure (7);
• the position sensitive detector (1) comprises an amplification device (4);
• and a position sensitive anode (2, 102) mounted behind the amplification device (4), with respect to the direction of irradiation,
• wherein
• the amplification device (4) is realized as:
• a first electron multiplication cascade (131a) provided between the detector input face (137) and the anode (102), the first electron multiplication cascade (131a) comprising at least one electron multiplication device (104) arranged in a stack, the first electron multiplication cascade (131a) and the at least one electron multiplication device (104) having each an input face and an output face, the first electron multiplication cascade (131a) being adapted to multiply a quantum beam incident on its input face;
• and the detector further comprises:
• a detector input face (137) for transmitting a quantum beam (101) incident onto the detector;
• a high voltage supplier providing a potential gradient between the input face and the output face of the first electron multiplication cascade (131a), and
• means for measuring a detection timing pulse (140) for timing the detection of the quantum beam incident onto the detector;
• wherein
• the means for measuring a detection timing pulse (140) is connected to an input face (107) of one of the at least one electron multiplication devices (104) of the first electron multiplication cascade (131a), and
• an output face (108) of one of the at least one electron multiplication devices (104) of the first electron multiplication cascade (131a) is connected to a ground potential, said output face (108) being arranged between said input face (107) connected to the means for measuring a detection timing pulse (140) and the anode (102).