Device and method for supporting a substrate

A substrate support device comprising:

• a support member having;
• a lower-surface support section to support a lower surface of a substrate;
• a position restriction section provided on the lower-surface support section, the position restriction section being formed to surround a periphery of the substrate on the lower-surface support section and restrict a position of the substrate;
• and
• an inclined section provided on the support member, the inclined section being inclined downward from an outward position of a support region for the substrate surrounded by the position restriction section, towards the support region, such that a peripheral edge of the substrate slides downward on the inclined section and the substrate is guided to the lower-surface support section;
• wherein at least one of the lower-surface support section, the position restriction section, and the inclined section, includes a base material and a protective film including a first film covering the base material, and a second film stacked on the first film, the protective film being formed to prevent chemical erosion of the base material.