Cassette for loading substrate
AssigneeHydis Technologies Co., Ltd.
InventorKwon Soo Heo
Life of this patent
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AssigneeHydis Technologies Co., Ltd.
InventorKwon Soo Heo
Estimating the term…
Disclosed is a cassette for loading a substrate, which includes a cassette main body which includes upper and lower frames spaced apart at upper and lower sides, a plurality of internal support bars for supporting the substrate, side frames provided at opposite sides of the upper and lower frames and forms a box shape to internally receive the substrate; a center frame which includes a plurality of internal support bars for supporting the substrate and is vertically disposed in a back of the upper and lower frames; and a connecting member which is provided between the center frame and the cassette main body and detachably connects the center frame to the cassette main body, wherein the connecting member comprises a first fixing unit fixed to the cassette main body, and a second fixing unit fixed to the center frame and detachably coupled to the first fixing unit, the first fixing unit being installed at each of a front and a back of the cassette main body.
A cassette for loading a substrate, comprising
Dependencies are inferred from the claim text.