High throughput semiconductor device testing
AssigneeTeradyne, Inc.
InventorLawrence B. Luce
Life of this patent
Estimating the term…
Abstract
A test system that provides an output signal for analysis without requiring the test hardware to be idle during a settling interval. The test system includes a preprocessor that identifies the near-DC drift that occurs in the output signal and then adjusts the output signal to remove the near-DC drift. A set of values representing the near-DC drift at each of multiple times during the acquisition of a signal for analysis may be computed and used to model a settling profile of the signal by fitting a curve to the set of values. The model of the settling profile may then be subtracted from samples representing the output signal to provide an adjusted signal for further analysis.
Claims23
A method of manufacturing an electronic device, the method comprising:
- testing the electronic device, the testing comprising processing a signal by:
- receiving a plurality of samples of a periodic signal representing the output of the electronic device;
- with at least one processor, computing from at least a portion of the plurality of samples a first settling profile of the periodic signal;
- subtracting the first settling profile from the plurality of samples to obtain a first plurality of adjusted samples;
- and
- performing an analysis function on the first plurality of adjusted samples;
- and
- conditionally performing at least one manufacturing operation for the electronic device based on the results of testing the electronic device.
A test system comprising:
- a digitizer configured to receive an output of a device under test;
- a pre-processor configured to:
- receive a plurality samples from the digitizer;
- derive a settling profile in the output of the device under test based on the plurality of samples;
- and
- subtracting the settling profile from the plurality of samples to produce a plurality of adjusted samples;
- and
- a processor configured to receive the plurality of adjusted samples and perform a test function based on the plurality of adjusted samples.
A non-transitory, computer-readable storage medium comprising computer-executable instructions that, when executed, test an electronic device according to a method comprising:
- processing a plurality of samples of a periodic signal representing an output of the electronic device by:
- fitting a polynomial to at least a portion of the plurality of samples;
- subtracting values based on the polynomial from the plurality of samples to provide adjusted samples, the values based on the polynomial representing settling in the output of the electronic device;
- and
- conditionally performing at least one operation on the electronic device based on the results of processing the plurality of samples.
Dependencies are inferred from the claim text.