Method and system for managing process jobs in a semiconductor fabrication facility
AssigneeApplied Materials, Inc.
InventorsShay Assaf, Venkatesh Babu, Robert D. Flores, Brendan Hickey, Krishna Kuttannair, Song J. Park, Adrian Rhee, Chongyang Chris Wang
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Abstract
A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.
Claims20
A computer-implemented method for managing process jobs in semiconductor fabrication, the method comprising:
- receiving a plurality of process jobs associated with one or more priorities of fabrication processing;
- ordering with a queue the plurality of process jobs in an order reflecting the one or more priorities of fabrication processing associated with the plurality of process jobs;
- executing a current process job selected from the plurality of process jobs in the queue based on the order reflecting the one or more priorities of fabrication processing;
- upon receiving, in real time, a new process job with a priority of fabrication processing higher than the one or more priorities of fabrication processing associated with the plurality of process jobs, modifying, in real time, the order reflecting the priorities of fabrication processing to place the new process job ahead of the plurality of process jobs in the queue;
- and
- executing the new process job upon completion of execution of the current process job based on the modified order.
A computer-implemented method for managing process jobs in semiconductor fabrication, the method comprising:
- checking a plurality of process jobs to determine whether one or more priorities of fabrication processing are associated with the plurality of process jobs;
- preparing job information including the priorities of fabrication processing;
- and
- sending out the job information for the plurality of process jobs to be executed in an order reflecting the priorities of fabrication processing, wherein the order is modified in real time when a new process job with a priority higher than the priorities of the plurality of process jobs is added to be executed to place the new process job ahead of the plurality of process jobs in a queue such that the new process job is executed upon completion of a currently executing process based on the modified order.
A system for managing process jobs in semiconductor fabrication, the system comprising:
- a queue to queue process jobs;
- and
- a real-time sequencer, coupled to the queue, to receive a plurality of process jobs associated with one or more priorities of fabrication processing, to order with the queue the plurality of process jobs in an order reflecting the one or more priorities of fabrication processing associated with the plurality of process jobs, to execute a current process job selected from the plurality of process jobs in the queue based on the order reflecting the one or more priorities of fabrication processing, to modify, in real time, the order reflecting the priorities of fabrication processing to place the new process job ahead of the plurality of process jobs in the queue upon receiving, in real time, a new process job with a priority higher than the one or more priorities of fabrication processing associated with the plurality of process jobs, and to execute the new process job upon completion of execution of the current process job based on the modified order.
A non-transitory computer-readable storage medium storing instructions that when executed by a computer, cause the computer to perform a method for managing process jobs in semiconductor fabrication, the method comprising:
- receiving a plurality of process jobs associated with one or more priorities of fabrication processing;
- and
- ordering with a queue the plurality of process jobs in an order reflecting the one or more priorities of fabrication processing associated with the plurality of process jobs;
- executing a current process job selected from the plurality of process jobs in the queue based on the order reflecting the one or more priorities of fabrication processing;
- upon receiving, in real time, a new process job with a priority higher than the one or more priorities of fabrication processing associated with the plurality of process jobs, modifying, in real time, the order reflecting the priorities of fabrication processing to place the new process job ahead of the plurality of process jobs in the queue;
- and
- executing the new process job upon completion of execution of the current process job based on the modified order.
Dependencies are inferred from the claim text.