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US 8,526,642 B2Granted
Piezoelectric micro speaker including weight attached to vibrating membrane and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSeok-whan Chung, Dong-kyun Kim, Byung-gil Jeong, Jun-sik Hwang
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Abstract
Provided are a piezoelectric micro speaker and a method of manufacturing the same. The piezoelectric micro speaker includes: a substrate having a cavity therein; a diaphragm that is disposed on the substrate, the diaphragm including a vibrating membrane that overlaps the cavity; a piezoelectric actuator that is disposed on the vibrating membrane; and a weight that is disposed in the cavity and attached to a center portion of the vibrating membrane.
Claims12
A piezoelectric micro speaker comprising:
- a substrate having a cavity therein;
- a diaphragm that is disposed on the substrate, the diaphragm comprising a vibrating membrane that overlaps the cavity;
- a piezoelectric actuator that is disposed on the vibrating membrane;
- and
- a weight that is disposed in the cavity and attached to a center portion of the vibrating membrane,
- wherein the vibrating membrane of the diaphragm comprises a first vibrating membrane that is disposed over a center of the cavity, and a second vibrating membrane that is disposed over an edge of the cavity and formed of a different material from the first vibrating membrane, and
- wherein the piezoelectric actuator is disposed on the first vibrating membrane, and the weight is attached to a center portion of the first vibrating membrane.
4 more elements
A piezoelectric micro speaker comprising:
- a substrate having a cavity therein;
- a diaphragm that is disposed on the substrate, the diaphragm comprising a vibrating membrane that overlaps the cavity;
- a piezoelectric actuator that is disposed on the vibrating membrane;
- and
- a weight that is disposed in the cavity and attached to a center portion of the vibrating membrane,
- wherein the weight has a substantially columnar shape, and a center of the weight is disposed on a center line of the cavity, and
- wherein the weight has a substantially cylindrical shape, and a diameter of the weight is between about 50 μm and about 1000 μm.
4 more elements
Dependencies are inferred from the claim text.