Compound X-ray lens having multiple aligned zone plates
AssigneeXradia, Inc.
InventorsAlan Francis Lyon, Michael Feser, Wenbing Yun, Sharon Chen
Life of this patent
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AssigneeXradia, Inc.
InventorsAlan Francis Lyon, Michael Feser, Wenbing Yun, Sharon Chen
Estimating the term…
A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.
A method for fabricating a compound zone plate comprising:
A method for fabricating a compound zone plate comprising:
A method for fabricating a compound zone plate comprising:
A method for fabricating a compound zone plate comprising:
A method for fabricating a compound zone plate comprising:
A method for fabricating a compound zone plate comprising:
A method for fabricating a compound zone plate comprising:
A method for fabricating a compound zone plate comprising:
Dependencies are inferred from the claim text.