Extendable electrode for gas discharge laser
AssigneeCymer, Inc.
InventorsRichard L. Sandstrom, Tae (Mark) H. Chung, Richard C. Ujazdowski
Life of this patent
Estimating the term…
Abstract
A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.
Claims16
A movable electrode assembly for use in a laser system, comprising:
- a first electrode having a first discharge surface;
- a second electrode having a second discharge surface, the second electrode being arranged opposite from the first electrode, the second discharge surface being spaced apart from the first discharge surface by an inter-electrode spacing having an initial spacing;
- an inter-electrode spacing mechanism interfaced with at least one of the second electrode or the first electrode, the inter-electrode spacing mechanism configured to adjust the inter-electrode spacing to the initial spacing;
- and
- an electrical shield disposed between the inter-electrode spacing mechanism and at least one of the second electrode and the first electrode, the inter-electrode spacing mechanism including:
- a camshaft in contact with a first surface of the at least one of the second electrode or the first electrode, the camshaft including at least one cam and an axis of rotation, the first surface being disposed opposite from the corresponding first discharge surface or second discharge surface of the least one of the second electrode or the first electrode;
- and
- an actuator coupled to the camshaft, the actuator configured to rotate the camshaft around the axis of rotation.
A movable electrode assembly for use in a laser system, comprising:
- a first electrode having a first discharge surface;
- a second electrode having a second discharge surface, the second electrode being arranged opposite from the first electrode, the second discharge surface being spaced apart from the first discharge surface by an inter-electrode spacing having an initial spacing;
- an inter-electrode spacing mechanism interfaced with the first electrode;
- and
- an electrical shield disposed between the inter-electrode spacing mechanism and the first electrode, the inter-electrode spacing mechanism including:
- a camshaft in contact with a first surface of the first electrode, the camshaft, the first surface being disposed opposite from the first discharge surface;
- and
- an actuator coupled to the camshaft, the actuator configured to adjust the inter-electrode spacing to a selected spacing.
A movable electrode assembly for use in a laser system, comprising:
- a first electrode having a first elongated discharge surface;
- a second electrode having a second elongated discharge surface, the second elongated discharge surface being arranged opposite from and parallel to the first elongated discharge surface, the second elongated discharge surface being spaced apart from the first elongated discharge surface by an inter-electrode spacing having an initial spacing;
- an inter-electrode spacing mechanism interfaced with the first electrode;
- and
- an electrical shield disposed between the inter-electrode spacing mechanism and the first electrode, the inter-electrode spacing mechanism including:
- a camshaft in contact with a first surface of the first electrode, the camshaft, the first surface being disposed opposite from the first elongated discharge surface;
- and
- an actuator coupled to the camshaft, the actuator configured to adjust the inter-electrode spacing to a selected spacing.
Dependencies are inferred from the claim text.