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US 8,526,479 B2Granted
Laser tube with distributed taps for a gas discharge RF-excited laser
AssigneeSynrad, Inc.
InventorMichael W. Murray
Life of this patent
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Abstract
A laser device is provided. The laser device includes a laser tube, and power devices distributed uniformly along the length of the laser tube.
Claims13
A device for an RF-excited gas laser, comprising:
- a laser tube, including:
- a first electrode;
- a second electrode;
- a discharge region disposed between the first and second electrode;
- a plurality of pairs of taps, wherein each pair of the plurality of pairs of taps includes a first tap of the pair that is coupled to the first electrode, and a second tap of the pair that is coupled the second electrode, wherein the plurality of pairs of taps are distributed along a length of the laser tube;
- and
- a plurality of power devices, wherein a first power device of the plurality of power devices is coupled to the first electrode and the second electrode via a first pair of taps of the plurality of taps, the first power device of the plurality of power devices is arranged to provide radio-frequency (RF) power to at least the first tap of the first pair of taps of the plurality of taps, a second power device of the plurality of power devices is coupled to the first electrode and the second electrode via a second pair of taps of the plurality of taps, and wherein the second power device of the plurality of power devices is arranged to provide radio-frequency (RF) power to at least the first tap of the second pair of taps of the plurality of taps.
4 more elements
A method for laser generation, comprising:
- generating a laser by providing RF power to each tap of a plurality of pairs of taps of a gas laser tube, wherein the plurality of pairs of taps are distributed along the length of the gas laser tube, and each pair of the plurality of pairs of taps includes a first tap that is coupled to a first electrode, and a second tap that is coupled to a second electrode, wherein providing RF power includes providing RF power via at least a first power device and a second power device coupled to each of the first electrode and the second electrode via corresponding pairs of taps.
Dependencies are inferred from the claim text.