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US 8,526,271 B2Granted
Capacitive micromachined ultrasonic transducer with voltage feedback
AssigneeKolo Technologies, Inc.
InventorYongli Huang
Life of this patent
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Abstract
Implementations of a capacitive micromachined ultra-sonic transducer (CMUT) include a feedback component connected in series with the CMUT. The feedback component applies a feedback on a voltage applied on the CMUT for affecting the voltage applied on the CMUT as a capacitance of the CMUT changes during actuation of the CMUT.
Claims20
A system comprising:
- a capacitive micromachined ultrasonic transducer (CMUT) comprising:
- a first electrode;
- a second electrode separated from the first electrode by a gap so that a first capacitance exists between the first electrode and the second electrode;
- a spring element supporting the second electrode for enabling the second electrode to move toward and away from the first electrode;
- and
- a feedback component connected in series with the CMUT, the feedback component providing a feedback on a voltage applied to the CMUT.
3 more elements
A method comprising:
- providing a capacitive micromachined ultrasonic transducer (CMUT) including a first electrode and a second electrode separated from the first electrode by a space so that a first capacitance exists between the first electrode and the second electrode, the electrode being supported by a spring element for enabling the second electrode to move toward the first electrode and return toward an original position, wherein there is a first capacitance between the first electrode and the second electrode;
- and
- placing a feedback capacitor in series with the CMUT, the feedback capacitor having a second capacitance based on the first capacitance between the first electrode and the second electrode of the CMUT.
A system comprising:
- a capacitive micromachined ultrasonic transducer (CMUT) comprising:
- a first electrode;
- a second electrode separated from the first electrode by a gap so that a first capacitance exists between the first electrode and the second electrode when the second electrode is in a first position;
- and
- a flexible element supporting the second electrode for enabling the second electrode to move from the first position toward the first electrode for a predetermined displacement when a voltage is applied and return to the first position for producing acoustic energy;
- and
- a feedback capacitor connected in series with the CMUT, the feedback capacitor having a second capacitance between 10 and 300 percent of the first capacitance, wherein the feedback capacitor and the CMUT form a voltage divider so that an increase of the first capacitance of the CMUT decreases the voltage applied on the CMUT as the feedback capacitor provides a negative feedback on the voltage applied on the CMUT.
4 more elements
Dependencies are inferred from the claim text.