Mechanical light modulators with stressed beams

A spatial light modulator comprising:

• a substrate having a surface;
• and
• a modulation assembly coupled to the substrate including a modulation element, a first compliant beam, and second compliant beam, at least one of the first and second compliant beams forming a portion of an electrostatic actuator of the modulation assembly,
• wherein the modulation assembly is configured such that both the first compliant beam and the second compliant beam attach to the modulation element.

A spatial light modulator comprising:

• a substrate having a surface;
• a light modulation assembly coupled to the substrate including a modulation element and a compliant beam, the compliant beam forming a portion of an actuator of the modulation assembly;
• and
• a stationary structure that is not coupled to the compliant beam, and wherein the stationary structure limits the bending of the compliant beam.

A spatial light modulator comprising:

• a substrate having a surface;
• a modulation assembly coupled to the substrate including a modulation element and a compliant beam, the compliant beam being shaped to promote motion substantially parallel to the surface;
• and
• a plurality of attachment points coupling the compliant beam to the substrate at positions on the compliant beam.