MEMS scanning micromirror

A MEMS scanning micromirror comprising:

• a mirror body having a mirror support, the mirror body having a rotation axis with a first extension bar and a second extension bar parallel to the rotation axis 58;
• a mirror supported on the mirror support of the mirror body;
• a frame having a mirror recess with a recess periphery, the frame having a first opposed frame bar and a second opposed frame bar on the recess periphery along the rotation axis;
• a first cantilever beam fixed to the first opposed frame bar perpendicular to the rotation axis and coupled to a first end of the first extension bar;
• a second cantilever beam fixed to the first opposed frame bar perpendicular to the rotation axis and coupled to a first end of the second extension bar;
• a third cantilever beam fixed to the second opposed frame bar perpendicular to the rotation axis and coupled to a second end of the first extension bar;
• a fourth cantilever beam fixed to the second opposed frame bar perpendicular to the rotation axis and coupled to a second end of the second extension bar;
• a first vertical support beam connected between the first frame opposed bar and the mirror body along the rotation axis;
• and
• a second vertical support beam connected between the second opposed frame bar and the mirror body along the rotation axis.

A MEMS scanning micromirror system comprising:

• a frame;
• a micromirror body having a mirror support and a rotation axis;
• a mirror supported on the mirror support of the mirror body;
• means for supporting the micromirror body in the frame;
• and
• means for providing torsional stiffness to the micromirror body about the rotation axis.