Vibrator element, vibrator, oscillator, and electronic device
AssigneeSeiko Epson Corporation
InventorTakashi Yamazaki
Life of this patent
Estimating the term…
Abstract
A vibrator element includes: a base portion; and three vibrating arms that extend from the base portion in the Y axis direction. The vibrating arms are arranged in the X axis direction, include excitation electrodes on a principal face, and vibrate in the Z axis direction. When an arm width of the vibrating arm, which is located at the center of the arrangement, in the X axis direction is W1, each arm width of the other vibrating arms in the X axis direction is W, an electrode width of the excitation electrode of the vibrating arm, which is located at the center of the arrangement, in the X axis direction is A1, and each electrode width of the excitation electrodes of the other vibrating arms in the X axis direction is A, 1.35<W1/W<1.90 and 1.35<A1/A<1.90.
Claims18
A vibrator element comprising:
- a base portion;
- and
- at least three vibrating arms that extend from the base portion in a first direction,
- wherein the vibrating arms are arranged in a second direction perpendicular to the first direction, and each one of the vibrating arms includes an excitation electrode at least on one principal face extending along a plane that is specified by the first direction and the second direction,
- wherein each one of the vibrating arms is vibrated by the excitation electrode in a third direction perpendicular to the principal face, and
- wherein, when the vibrating arm located at the center of the arrangement out of the vibrating arms is set as a first vibrating arm, and each one of the vibrating arms located on both ends of the arrangement is set as a second vibrating arm, the first vibrating arm and the second vibrating arm vibrate in opposite directions, and, when an arm width of the first vibrating arm in the second direction is W1, an arm width of the second vibrating arm in the second direction is W, an electrode width of the excitation electrode of the first vibrating arm in the second direction is A1, and an electrode width of the excitation electrode of the second vibrating arm in the second direction is A, 1.35<W1/W<1.90 and 1.35<A1/A<1.90.
Dependencies are inferred from the claim text.