Semiconductor device having plural optical fuses and manufacturing method thereof
AssigneeElpida Memory, Inc.
InventorShigeyuki Nakazawa
Life of this patent
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Abstract
Such a device is disclosed that includes a first ladder fuse for which blowing points are arranged at a first coordinate and a second ladder fuse for which blowing points are arranged at a second coordinate. When adjustment data for adjusting circuit characteristics is within a first range, a trimming operation is performed on both the first and second ladder fuses, and when the adjustment data for adjusting the circuit characteristics is within a second range, the trimming operation is performed on the second ladder fuse without performing the trimming operation on the first ladder fuse. This configuration eliminates a necessity of irradiation on the first ladder fuse with a laser when the adjustment data is within the second range.
Claims24
A semiconductor device comprising:
- a first circuit;
- and
- a plurality of optical fuses that store adjustment data to adjust characteristics of the first circuit, wherein
- the optical fuses are grouped into at least first and second ladder fuses,
- the optical fuses belonging to the first ladder fuse are arranged at each intersection of a first Y-coordinate with a plurality of X-coordinates,
- the optical fuses belonging to the second ladder fuse are arranged at each intersection of a second Y-coordinate with a plurality of X-coordinates,
- when the adjustment data is within a first range, the adjustment data is represented by an output signal of the first ladder fuse in which at least one of the optical fuses is trimmed and an output signal of the second ladder fuse in which at least one of the optical fuses is trimmed, and
- when the adjustment data is within a second range, the adjustment data is represented by the output signal of the first ladder fuse in which none of the optical fuses is trimmed and the output signal of the second ladder fuse in which at least one of the optical fuses is trimmed.
A semiconductor device comprising:
- a first circuit;
- a first ladder fuse including a plurality of first optical fuses arranged along a first line;
- and
- a second ladder fuse including a plurality of second optical fuses arranged along a second line, wherein
- the first and second ladder fuses store adjustment data that adjusts characteristics of the first circuit,
- the first and second lines are directed toward a first coordinate whereas second coordinates of the first and second lines are different from each other,
- the adjustment data is within a first range when at least one of the first optical fuses and at least one of the second optical fuses are a programmed state, and
- the adjustment data is within a second range when none of the first optical fuses and at least one of the second optical fuses is the programmed state.
A method of manufacturing a semiconductor device, comprising:
- providing a semiconductor wafer having first and second ladder fuses each including a plurality of optical fuses to store adjustment data that adjusts characteristics of a first circuit;
- and
- trimming the optical fuses by scanning a laser irradiation position along an X-coordinate on the first ladder fuse and scanning the laser irradiation position along the X-coordinate on the second ladder fuse after changing a Y-coordinate of the laser irradiation position when the adjustment data is within a first range;
- and
- trimming the optical fuses by scanning the laser irradiation position along the X-coordinate on the second ladder fuse without scanning the laser irradiation position along the X-coordinate on the first ladder fuse when the adjustment data is within a second range.
A method of manufacturing a semiconductor device, comprising:
- providing first and second ladder fuses each including a plurality of optical fuses to store adjustment data that adjusts characteristics of a first circuit;
- when the adjustment data is within a first range,
- trimming at least one of the optical fuses included in the first ladder fuse by scanning a laser irradiation position in an X-direction with a Y-coordinate fixed to a first Y-coordinate,
- moving the Y-coordinate of the laser irradiation position from the first Y-coordinate to a second Y-coordinate, and
- trimming at least one of the optical fuses included in the second ladder fuse by scanning the laser irradiation position in the X-direction with the Y-coordinate fixed to the second Y-coordinate;
- and
- when the adjustment data is within a second range, trimming at least one of the optical fuses included in the second ladder fuse by scanning the laser irradiation position in the X-direction with the Y-coordinate fixed to the second Y-coordinate without trimming any one of the optical fuses included in the first ladder fuse.
Dependencies are inferred from the claim text.