Electron emission element including diamond doped with phosphorus
AssigneeKabushiki Kaisha Toshiba
InventorsMariko Suzuki, Tadashi Sakai, Naoshi Sakuma, Masayuki Katagiri, Yuichi Yamazaki
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Abstract
According to the embodiment, an electron emission element includes a conductive substrate, a first diamond layer of a first conductivity type formed on the conductive substrate, and a second diamond layer of the first conductivity type formed on the first diamond layer. Thereby, it becomes possible to provide the electron emission element having a high electron emission amount and a high current density even in a low electric field at low temperature and the electron emission apparatus using this electron emission element.
Claims7
An electron emission element comprising:
- a conductive substrate having a first main surface and a second main surface;
- a first diamond layer of a first conductivity type formed on the first main surface of the conductive substrate;
- a second diamond layer of the first conductivity type formed on a first portion of a first main surface of the first diamond layer, wherein the first main surface of the first diamond layer is opposite the second main surface of the first diamond layer which is in contact with the first main surface of the conductive substrate;
- a first electrode formed on a second portion of the first main surface of the first diamond layer, wherein the first portion of the first main surface of the first diamond layer is disparate to the second portion of the first main surface of the first diamond layer;
- and
- a second electrode formed on the second main surface of the conductive substrate, so as to sandwich the conductive substrate and the first diamond layer in series between the first electrode and the second electrode,
- wherein, in the event of application of electric power between the first electrode and the second electrode, the first diamond layer and the conductive substrate are self-heated by current flowing therethrough, thereby heating the second diamond layer.
An electron emission apparatus comprising:
- a hermetic envelope;
- a cathode provided in the hermetic envelope;
- an electron emission element which comprises:
- a conductive substrate which has a first main surface and a second main surface and is mounted on the cathode so that electrical conduction is achieved between the second main surface and the cathode;
- a first diamond layer of a first conductivity type formed on the first main surface of the conductive substrate;
- a second diamond layer of the first conductivity type formed on a first portion of a first main surface of the first diamond layer, wherein the first main surface of the first diamond layer is opposite the second diamond layer which is in contact with the first main surface of the conductive substrate;
- and
- an energizing electrode formed on a second portion of the first main surface of the first diamond layer is disparate to the second portion of the first main surface of the first diamond layer;
- and
- an anode provided in the hermetic envelope to face the second diamond layer to be spaced apart from the second diamond layer, wherein, in the event of application of electric power between the energizing electrode and the cathode, the first diamond layer and the conductive substrate are self-heated by current flowing therethrough, thereby heating the second diamond layer.
Dependencies are inferred from the claim text.