MEMS device with protection rings
AssigneeUnited Microelectronics Corp.
InventorsTzung-Han Tan, Bang-Chiang Lan, Ming-I Wang, Chien-Hsin Huang, Meng-Jia Lin
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Abstract
A microelectromechanical system (MEMS) device and a method for fabricating the same are described. The MEMS device includes a first electrode and a second electrode. The first electrode is disposed on a substrate, and includes at least two metal layers, a first protection ring and a dielectric layer. The first protection ring connects two adjacent metal layers, so as to define an enclosed space between two adjacent metal layers. The dielectric layer is disposed in the enclosed space and connects two adjacent metal layers. The second electrode is disposed on the first electrode, wherein a cavity is formed between the first electrode and the second electrode.
Claims8
A microelectromechanical system (MEMS) device, comprising:
- a first electrode, disposed on a substrate and comprising:
- at least two metal layers;
- a first protection ring, connecting two adjacent metal layers, so as to define an enclosed space between two adjacent metal layers;
- and
- a dielectric layer, disposed in the enclosed space and connecting two adjacent metal layers;
- and
- a second electrode, disposed on the first electrode, wherein a cavity is formed between the first electrode and the second electrode.
Dependencies are inferred from the claim text.