Boundary acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorTakashi Yamane
Life of this patent
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Abstract
In a boundary acoustic wave device, a silicon oxide layer and a dielectric layer exhibiting a higher acoustic velocity than the silicon oxide layer are stacked on a LiTaO3 piezoelectric substrate, and IDT electrodes are disposed in grooves in an upper surface of the piezoelectric substrate. Each of the IDT electrodes includes a main electrode layer made of a metal having a density of about 16 g/cm3 or higher, and an auxiliary electrode layer made of a metal having a density within a range of about 3 g/cm3 to about 16 g/cm3. Further, θ of Euler angles (0°, θ, 0°) of the piezoelectric substrate is set within a range of about (θ0−20°) to about (θ0+20°) with respect to θ0 expressed by the formula: θ0=65.53G+0.7568F+0.8454E+7.091D+1.609C−0.03789B−3.535A+60.85.
Claims9
A boundary acoustic wave device comprising:
- a piezoelectric substrate made of LiTaO3 and including a groove in an upper surface thereof;
- an IDT electrode arranged such that at least a portion of the IDT electrode is buried in the groove of the piezoelectric substrate;
- a silicon oxide layer stacked on the piezoelectric substrate;
- and
- a dielectric layer made of a dielectric exhibiting a higher acoustic velocity than the silicon oxide layer;
- wherein
- the IDT electrode includes a main electrode layer made of a metal having a density of about 16 g/cm3 or higher, and an auxiliary electrode layer made of a metal having a density of about 4 g/cm3 or higher, but lower than 16 g/cm3;
- and
- where a wavelength of a boundary acoustic wave excited by the IDT electrode is λ, a depth A of the groove corresponding to a partial length of the IDT electrode buried in the groove is within a range of about 0.1% to about 10% of λ, a film thickness B of the silicon oxide layer is within a range of about 20% to about 140% of λ, the density of the main electrode is denoted by C (g/cm3), a thickness D of the main electrode layer is within a range of about 1% to about 10% of λ, the density of the auxiliary electrode is denoted by E (g/cm3), a thickness F of the auxiliary electrode positioned above the main electrode layer is within a range of about 0% to about 10% of λ, and a duty ratio G of the IDT electrode is within a range of about 0.4 to about 0.7, θ of Euler angles (0°, θ, 0°) of the piezoelectric substrate made of LiTaO3 is within a range of about (θ0−20°) or more to about (θ0+20°) or less with respect to θ0 expressed by:
- θ0=65.53G+0.7568F+0.8454E+7.091D+1.609C−0.03789B−3.535A+60.85.
Dependencies are inferred from the claim text.