System for reducing sensor area in a back side illuminated CMOS active pixel sensor
AssigneeAptina Imaging Corporation
InventorRay Alan Mentzer
Life of this patent
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Abstract
The present invention relates to a backside illuminated (BSI) imager having a plurality of layers. A plurality of pixel sensors are positioned on a first layer of a substrate. Pixel select conductors are positioned on the substrate in front of the first layer. Pixel readout conductors including a plurality of output lines, pixel power conductors, and a ground conductor are positioned on the substrate in front of the pixel select conductors. A plurality of sample and hold capacitors coupled to the pixel output lines are positioned vertically and/or horizontally on the substrate in front of the ground conductor.
Claims20
A backside illuminated (BSI) imager having a plurality of layers, including:
- a plurality of pixel sensors positioned on a first layer of a substrate;
- pixel select conductors positioned on the substrate in front of the first layer;
- pixel readout conductors, pixel power conductors, and a ground conductor positioned on the substrate in front of the pixel select conductors, the pixel readout conductors including a plurality of pixel output lines;
- and
- a plurality of sample and hold capacitors positioned vertically on the substrate in front of the ground conductor, the plurality of sample and hold capacitors coupled to the pixel output lines.
A backside illuminated (BSI) imager having a plurality of layers, including:
- a plurality of pixel sensors positioned in a first layer of a substrate;
- pixel select conductors positioned in the substrate in front of the first layer;
- pixel readout conductors and pixel power conductors positioned in the substrate in front of the pixel select conductors, the pixel readout conductors including a plurality of pixel output lines;
- a ground conductor positioned in the substrate in front of the pixel readout conductors and pixel power conductors;
- and
- a plurality of sample and hold capacitors positioned horizontally in the substrate in front of the ground conductor, the plurality of sample and hold capacitors coupled to the pixel output lines.
A method for making a backside illuminated (BSI) imager, the method including the steps of:
- forming a plurality of pixel sensors and pixel select circuits in a first layer of a substrate;
- forming pixel select conductors, pixel readout conductors and pixel power conductors on the substrate in front of the first layer, the pixel readout conductors including a plurality of pixel output lines;
- forming a ground conductor on the substrate in front of the pixel select conductors;
- and
- forming a plurality of sample and hold capacitors on the substrate in front of the ground conductor, the plurality of sample and hold capacitors coupled to the pixel output lines.
Dependencies are inferred from the claim text.