Lithography system

A method for transferring a pattern onto the surface of a target using a lithography system comprising at least one beam generator, a modulation array and a deflector array, said method comprising:

• generating a plurality of beamlets in said beam generator;
• modulating said plurality of beamlets in said modulation array for either let the beamlet pass or completely or partly stopping each of said beamlets individually from reaching the target surface, under control of said signals coming from a control unit
• focusing said passed beamlets on the target surface,
• wherein said modulation array is controlled using modulated light beams, wherein each light beam holds part of the pattern data for controlling one or more modulators,
• wherein said light beam is projected from an optical fiber end on a light sensitive element for converting said light beam into a signal for actuating said one or more modulators and is directed into a virtual space column defined by said plurality of beamlets, wherein the light sensitive element is integrated in said modulation array.

A method for transferring a pattern onto the surface of a target using a lithography system comprising at least one beam generator, a modulation array and a deflector array, said method comprising:

• generating a plurality of beamlets in said beam generator;
• modulating said plurality of beamlets in said modulation array for either letting the beamlet pass or completely or partly stopping each of said beamlets individually from reaching the target surface, under control of said signals coming from a control unit
• focusing said passed beamlets on the target surface,
• wherein said modulation array is controlled using modulated light beams, wherein each light beam holds part of the pattern data for controlling one or more modulators,
• wherein the data transfer to a light sensitive element, for converting said light beam into a signal for actuating said one or more modulators, is performed using optical fibers of at least two fiber arrays connected to said modulation array, wherein the light sensitive elements are arranged on more than one part of the modulation array to be illuminated by respective fiber arrays.