Laser irradiation apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKoichiro Tanaka
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Abstract
The present invention is to provide a laser irradiation apparatus for forming a laser beam which has a shape required for the annealing and which has homogeneous energy distribution, by providing a slit at an image-formation position of a diffractive optical element, wherein the slit has a slit opening whose length is changeable. The laser irradiation apparatus comprises a laser oscillator, a diffractive optical element, and a slit, wherein the slit has a slit opening whose length in a major-axis direction thereof is changeable, wherein a laser beam is delivered obliquely to a substrate, and wherein the laser beam is a continuous wave solid-state, gas, or metal laser, or a pulsed laser with a repetition frequency of 10 MHz or more.
Claims36
A laser irradiation apparatus comprising:
- a laser oscillator;
- a diffractive optical element;
- a slit;
- and
- a condensing lens,
- wherein the slit is provided between the diffractive optical element and the condensing lens on an optical path of a laser beam emitted from the laser oscillator, and
- wherein the slit has shielding plates for shielding end portions of the laser beam so that a length of a slit opening is changeable.
A laser irradiation apparatus comprising:
- a laser oscillator;
- a diffractive optical element;
- a slit;
- and
- a condensing lens,
- wherein the slit is provided between the diffractive optical element and the condensing lens on an optical path of a laser beam emitted from the laser oscillator, and
- wherein the slit has shielding plates for shielding end portions of the laser beam so that a length of a slit opening is changeable to form laser beams with different lengths.
A laser irradiation apparatus comprising:
- a laser oscillator;
- a diffractive optical element;
- a slit;
- and
- a condensing lens,
- wherein the slit is provided between the diffractive optical element and the condensing lens on an optical path of a laser beam emitted from the laser oscillator, and
- wherein the slit has shielding plates for shielding end portions of the laser beam so that a length of a slit opening is changeable to deliver formed laser beams with different lengths obliquely to an irradiation surface.
Dependencies are inferred from the claim text.