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US 8,525,070 B2Granted
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsKoichiro Tanaka, Yoshiaki Yamamoto
Life of this patent
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Abstract
A laser irradiation apparatus is provided with a laser oscillator, an articulated beam propagator in which a plurality of pipes are connected to each other in an articulated portion, and a course change means of a laser beam in the articulated portion. At least one pipe of the plurality of pipes includes a transfer lens for suppressing stagger of a laser beam in a traveling direction, in each pipe. The articulated portion produces degree of freedom in disposition of a laser oscillator, and the transfer lens enables suppression of change in beam profile.
Claims20
A laser irradiation apparatus comprising:
- a laser oscillator;
- and
- an articulated beam propagator configured to propagate a laser beam produced by the laser oscillator,
- an optical system configured to shape a beam shape of the laser beam emitted from an end of the articulated beam propagator into a linear shape on an irradiation surface;
- wherein the articulated beam propagator comprises:
- at least first and second articulated portions;
- a plurality of pipes, wherein one end of a first one of the plurality of pipes is connected to one end of a second one of the plurality of pipes through the first articulated portion, and wherein the other end of the first one of the plurality of pipes is connected to one end of a third one of the plurality of pipes through the second articulated portion;
- at least first and second course changers of the laser beam, the first and second course changers located in the first and second articulated portions respectively;
- and
- a lens included inside the first one of the plurality of pipes,
- wherein the lens is disposed so that the first and second course changers are conjugated to each other.
8 more elements
A laser irradiation apparatus comprising:
- a laser oscillator;
- an articulated beam propagator configured to propagate a laser beam produced by the laser oscillator;
- and
- an optical system configured to shape a beam shape of the laser beam emitted from an end of the articulated beam propagator into a linear shape on an irradiation surface;
- wherein the articulated beam propagator comprises:
- first, second, and third pipes;
- a first articulated portion connected to one end of the first pipe and one end of the second pipe;
- a second articulated portion connected to the other end of the first pipe and one end of the third pipe;
- a slit provided in the other end of the third pipe from which the laser beam is emitted;
- a first course changer of the laser beam, the first course changer located in the first articulated portion;
- a second course changer of the laser beam, the second course changer located in the second articulated portion;
- and
- first and second lenses included inside the first and second pipes respectively,
- wherein the optical system is provided between the slit and the irradiation surface,
- wherein the second lens is disposed so that an emission opening of the laser oscillator and the first course changer are conjugated to each other, and
- wherein the first lens is disposed so that the first course changer and the second course changer are conjugated to each other.
13 more elements
A laser irradiation apparatus comprising:
- a plurality of laser oscillators;
- and
- a plurality of articulated beam propagators, each of the plurality of articulated beam propagators configured to propagate a laser beam produced by each of the plurality of laser oscillators respectively;
- and
- a plurality of optical systems, each of the plurality of optical systems configured to shape a beam shape of the laser beam emitted from an end of each of the plurality of articulated beam propagator into a linear shape on an irradiation surface;
- wherein each of the plurality of articulated beam propagators comprises:
- at least first and second articulated portions;
- a plurality of pipes, wherein one end of a first one of the plurality of pipes is connected to one end of a second one of the plurality of pipes through the first articulated portion, and wherein the other end of the first one of the plurality of pipes is connected to one end of a third one of the plurality of pipes through the second articulated portion;
- first and second course changers of the laser beam, the first and second course changers located in the first and second articulated portions respectively;
- and
- a lens included inside the first one of the plurality of pipes,
- wherein the lens is disposed so that the first and second course changers are conjugated to each other.
9 more elements
Dependencies are inferred from the claim text.