Process for producing monomer for fluorinated resist
AssigneeCentral Glass Company, Limited
InventorsShinya Akiba, Ryo Nadano, Yutaka Katsuhara
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Abstract
According to the present invention, an α-substituted acrylic ester monomer for a fluorinated resist is produced by direct addition of an α-substituted acrylic acid to a fluorinated alkene in the presence of a specific acid catalyst having a sulfonyl group. By the use of such a specific acid catalyst, it is possible to achieve industrial-scale production of the α-substituted acrylic ester monomer for the fluorinated resist by carrying out the target addition reaction of the fluorinated alkene and the α-substituted acrylic acid efficiently during the occurrence of side reactions such as isomerization of the alkene, generation of a diol and excessive addition of the α-substituted acrylic acid.
Claims4
A process for producing a monomer of the formula [3] for a fluorinated resist by reaction of a fluorinated alkene of the formula [1] with an α-substituted acrylic acid of the formula [2] in the presence of an acid catalyst,
- wherein the acid catalyst is a sulfonyl-containing acid of the formula [4]:
- where R1 represents a hydrogen atom, a fluorine atom or a C1-C6 straight or branched alkyl group whose part or all of hydrogen atoms may be substituted with a fluorine atom
- where R1 has the same meaning as in the formula [2]
- HASO2Rf)n [4]
- where A represents an oxygen atom or a carbon atom;
- each Rf independently represents a fluorine atom, a hydroxyl group or a C1-C6 fluorinated alkyl group;
- and n represents an integer of 1 or 3.
Dependencies are inferred from the claim text.