Precursor compositions for ALD/CVD of group II ruthenate thin films

A composition comprising a compound or complex comprising a mixed ligand monomeric Cp complex of ruthenium, calcium strontium or barium, selected from among:

• ruthenium beta-diketiminate compounds of the formula
• wherein each of R1, R2, R3, R4 and R5 can be the same as or different from the others, and each is independently selected from among hydrogen, C1-C12 alkyl, C1-C12 alkylamino, C3-C8 cycloalkyl, C6-C12 aryl, C5-C12 heteroaryl, C1-C12 alkoxy, C3-C6 alkylsilyl, C2-C12 alkenyl, R1R2NNR3, wherein R1, R2 and R3 may be the same as or different from one another and each is independently selected from hydrogen and C1-C6 alkyl, and pendant ligands including functional group(s) providing further coordination to the ruthenium central atom, and selected from among aminoalkyl, alkoxyalkyl, aryloxyalkyl, imidoalkyl, and acetylalkyl, and wherein each of R6, R7, and R8 can be the same as or different from the others, and is independently selected from hydrogen, C1-C6 alkyl, C6-C10 aryl, C1-C6 alkylamine, silyl and substituted silyl.

A composition comprising a compound or complex comprising a mixed ligand monomeric Cp complex of ruthenium, calcium, strontium or barium, selected from among:

• ruthenium beta-diketoiminate compounds of the formula
• wherein each of R1, R2, R3, R4 and R5 can be the same as or different from the others, and each is independently selected from among hydrogen, C1-C12 alkyl, C1-C12 alkylamino, C3-C8 cycloalkyl, C6-C12 aryl, C5-C12 heteroaryl, C1-C12 alkoxy, C3-C6 alkylsilyl, C2-C12 alkenyl, R1R2NNR3, wherein R1, R2 and R3 may be the same as or different from one another and each is independently selected from hydrogen and C1-C6 alkyl, and pendant ligands including functional group(s) providing further coordination to the ruthenium central atom, and selected from among aminoalkyl, alkoxyalkyl, aryloxyalkyl, imidoalkyl, and acetylalkyl, and wherein each of R6, R7, and R8 can be the same as or different from the others, and is independently selected from C1-C6 alkyl, C6-C10 aryl, C1-C6 alkylamine, silyl and substituted silyl.

A composition comprising a compound or complex comprising a mixed ligand monomeric Cp complex of ruthenium, calcium, strontium or barium, selected from among:

• ruthenium guanidinate compounds of the formula:
• wherein each of R1, R2, R3, R4 and R5 can be the same as or different from the others, and each is independently selected from among hydrogen, C1-C12 alkyl, C1-C12 alkylamino, C3-C8 cycloalkyl, C6-C12 aryl, C5-C12 heteroaryl, C1-C12 alkoxy, C3-C6 alkylsilyl, C2-C12 alkenyl, R1R2NNR3, wherein R1, R2 and R3 may be the same as or different from one another and each is independently selected from hydrogen and C1-C6alkyl, and pendant ligands including functional group(s) providing further coordination to the ruthenium central atom, and selected from among aminoalkyl, alkoxyalkyl, aryloxyalkyl, imidoalkyl, and acetylalkyl, and wherein each of R6, R7, R8 and R9 can be the same as or different from the others, and is independently selected from hydrogen, C1-C5 alkyl, C6-C10 aryl, C3-C9 cycloalkyl, silyl and substituted silyl.