Back to results
US 8,524,511 B1Granted
Method to connect a magnetic device to a CMOS transistor
AssigneeHeadway Technologies, Inc.
InventorsTom Zhong, Vinh Lam, Zhongjian Teng
Life of this patent
Estimating the term…
Abstract
A CMOS device is provided in a substrate. A magnetic tunnel junction (MTJ) is provided over the CMOS device and connected to the CMOS device by a metal ring contact wherein a dielectric or other filling material forms the center of the metal ring contact and wherein a bottom of the metal ring contact underlying said filling material is metal.
Claims20
A method of fabricating a magnetic random access memory device comprising:
- providing a metal contact to a CMOS landing pad in a substrate and covering said metal contact with a dielectric layer;
- opening a via in said dielectric layer thereby exposing said metal contact;
- forming a metal ring contact in said via wherein a filling layer is formed in a center of said metal ring and wherein a bottom of said metal ring contact underlying said filling layer is metal;
- and
- providing a magnetic tunnel junction (MTJ) structure on said metal ring contact.
2 more elements
A method of fabricating a magnetic random access memory device comprising:
- providing a metal contact to a CMOS landing pad in a substrate and covering said metal contact with a dielectric layer;
- opening a via in said dielectric layer thereby exposing said metal contact;
- depositing a metal film conformally within said opening;
- depositing a filling layer over said metal film;
- polishing said filling layer and said metal film, leaving said metal film only within said opening and leaving said filling layer overlying said metal film at the bottom of said opening filling all space within sidewalls of said metal film within said opening thereby forming a metal ring contact having said filling layer in a center of said metal ring;
- providing a magnetic tunnel junction (MTJ) structure over said metal ring contact wherein said MTJ structure electrically contacts said metal ring contact;
- and
- forming a bit line over said MTJ.
5 more elements
A spin-torque-transfer magnetic random access memory device comprising:
- a metal contact to a CMOS landing pad in a substrate;
- a metal ring contact on said metal contact wherein a filling layer is formed in a center of said metal ring and wherein a bottom of said metal ring contact underlying said filling layer is metal;
- and
- a magnetic tunnel junction over said CMOS landing pad and connected to said CMOS landing pad by said metal ring contact.
1 more element
Dependencies are inferred from the claim text.