Methods for producing crucibles with a reduced amount of bubbles
AssigneeMEMC Electronic Materials, Inc.
InventorsSteven L. Kimbel, Harold W. Korb, Richard J. Phillips, Shailendra B. Rathod
Life of this patent
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Abstract
Methods for producing crucibles for holding molten material that contain a reduced amount of gas pockets are disclosed. The methods may involve use of molten silica that may be outgassed prior to or during formation of the crucible. Crucibles produced from such methods and ingots and wafers that are produced from crucibles with a reduced amount of gas pockets are also disclosed.
Claims20
A process for producing a crucible for holding molten material, the crucible having a base and one or more sidewalls, the process comprising contacting a silicon and oxygen-containing gas with a crucible-shaped substrate having a base and one or more sidewalls to deposit silica onto the substrate, deposited silica continuously growing to form a surface layer of silica of at least about 1 mm.
A process for producing a crucible for holding molten material, the crucible comprising silica and having a base and one or more sidewalls, the process comprising shaping a plate or tube into the form of a crucible having a base and one or more sidewalls, the plate or tube comprising silica, the plate or tube having less than about 70 bubbles with a diameter of at least about 14 μm per cm3.
Dependencies are inferred from the claim text.