Method for manufacturing a device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorHiroki Ohara
Life of this patent
Estimating the term…
Abstract
A method for manufacturing a device, including evaporating a material at a first position, and moving a container that includes the material to a second position, so that an opening of the container is heated at a second temperature higher than a first temperature, the first temperature being a temperature of the opening at the first position, is provided.
Claims28
A method for manufacturing a layer comprising:
- forming a layer over a surface by evaporating a material at a first position,
- during the formation of the layer, moving a container that comprises the material to a second position so that an opening of the container is heated at a second temperature higher than a first temperature, wherein the first temperature is a temperature of the opening at the first position,
- wherein the second position is under the first position.
A method for manufacturing a layer comprising:
- forming a layer over a surface by evaporating a material at a first position at a first deposition rate,
- during the formation of the layer, when the first deposition rate is changed into a second deposition rate smaller than the first deposition rate, moving a container that comprises the material to a second position so that an opening of the container is heated at a second temperature higher than a first temperature, wherein the first temperature is a temperature of the opening at the first position,
- wherein the second position is under the first position.
A method for an evaporation comprising:
- evaporating a material at a first position,
- moving a container that comprises the material to a second position, so that an opening of the container is heated at a second temperature higher than a first temperature, wherein the first temperature is a temperature of the opening at the first position,
- wherein the second position is under the first position.
A method for manufacturing a layer comprising:
- forming a layer over a surface by evaporating a material at a first position,
- during the formation of the layer, moving a container that comprises the material to a second position so that an opening of the container is heated at a second temperature higher than a first temperature, wherein the first temperature is a temperature of the opening at the first position,
- wherein, at the second position, the material in the container is heated at a third temperature that the material does not evaporate.
A method for manufacturing a layer comprising:
- forming a layer over a surface by evaporating a material at a first position at a first deposition rate,
- during the formation of the layer, when the first deposition rate is changed into a second deposition rate smaller than the first deposition rate, moving a container that comprises the material to a second position so that an opening of the container is heated at a second temperature higher than a first temperature, wherein the first temperature is a temperature of the opening at the first position,
- wherein, at the second position, the material in the container is heated at a third temperature that the material does not evaporate.
A method for an evaporation comprising:
- evaporating a material at a first position,
- moving a container that comprises the material to a second position, so that an opening of the container is heated at a second temperature higher than a first temperature, wherein the first temperature is a temperature of the opening at the first position,
- wherein, at the second position, the material in the container is heated at a third temperature that the material does not evaporate.
Dependencies are inferred from the claim text.