Ozone generating apparatus
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsNoboru Wada, Masaki Kuzumoto, Yasutaka Inanaga
Life of this patent
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Abstract
An ozone generating apparatus is provided which includes a pair of electrodes for producing a discharge by the application of an ac voltage therebetween, and at least one dielectric provided between the pair of electrodes. A source gas containing oxygen is provided into a discharge space in which the discharge is produced to generate ozone by the action of the discharge. A surface lying between at least one of the pair of electrodes and the discharge space and in contact with the discharge has a surface resistivity of 104Ω to 1011Ω. The source gas provided into the discharge space includes ultrapure oxygen having a purity of not less than 99.9%.
Claims7
An ozone generating method comprising:
- producing a discharge by the application of an ac voltage between a pair of electrodes;
- providing at least one dielectric between at least one of said pair of electrodes and a discharge space in which said discharge is produced, said at least one dielectric in contact with said discharge, and having a surface resistivity of 104Ω to 1011Ω;
- and
- providing a source gas into said discharge space to generate ozone by the action of said discharge, the source gas provided into said discharge space being ultrapure oxygen having a purity of not less than 99.9%.
An ozone generating system comprising:
- a source gas being ultrapure oxygen having a purity of not less than 99.9%;
- and
- an ozone generating apparatus including:
- a pair of electrodes for producing a discharge by the application of an ac voltage therebetween;
- at least one dielectric provided between at least one of said pair of electrodes and a discharge space in which said discharge is produced, said at least one dielectric in contact with said discharge, and having a surface of resistivity of 104Ω to 1011Ω,
- wherein the source gas is provided into said discharge space to generate ozone by the action of said discharge.
Dependencies are inferred from the claim text.