Systems for purifying silane
AssigneeMEMC Electronic Materials, Inc.
InventorsTimothy Dinh Truong, Zhihui Gu, Puneet Gupta
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Abstract
Processes and systems for purifying silane-containing streams are disclosed with relatively less silane being lost in impurity streams by use of distillation and/or condensation operations.
Claims18
A system for purifying a silane-containing stream comprising silane and one or more compounds having a boiling point less than silane and being substantially free of trichlorosilane, tetrachlorosilane and tetrafluorosilane, the system comprising:
- a silane-containing stream conveying apparatus for conveying the silane-containing stream to a light-ends distillation column, wherein the silane-containing stream conveying apparatus is operatively connected to the light-ends distillation column;
- a light-ends distillation column for producing a silane-depleted overhead fraction and a silane-enriched bottoms fraction relative to the silane-containing stream, the silane-depleted overhead fraction comprising silane and compounds having a boiling point less than silane;
- a condenser for condensing a portion of the silane in the silane-depleted overhead fraction produced from the light-ends distillation column;
- and
- a gas-liquid separator for producing a gaseous stream and a liquid stream containing condensed silane.
A system for purifying a silane-containing stream comprising silane and one or more compounds having a boiling point greater than silane and one or more compounds with a boiling point less than silane and being substantially free of trichlorosilane, tetrachlorosilane and tetrafluorosilane, the system comprising:
- a silane-containing stream conveying apparatus for conveying the silane-containing stream to a light-ends distillation column, wherein the silane-containing stream conveying apparatus is operatively connected to the light-ends distillation column;
- a light-ends distillation column for producing a silane-depleted overhead fraction and a silane-enriched bottoms fraction relative to the silane-containing stream, the silane-depleted overhead fraction comprising silane and compounds having a boiling point less than silane;
- a condenser for condensing a portion of the silane in the silane-depleted overhead fraction produced from the light-ends distillation column;
- a heavy-ends distillation column for producing a silane-enriched overhead fraction and a silane-depleted bottoms fraction relative to the silane-enriched bottoms fraction produced from the light-ends distillation column, the silane-depleted bottoms fraction produced from the heavy-ends distillation column comprising silane and being enriched in one or more compounds having a boiling point greater than silane relative to the silane-containing stream;
- and
- a silane-recovery distillation column for producing a silane-recovery distillation column silane-enriched overhead fraction and a silane-recovery distillation column silane-depleted bottoms fraction relative to the silane-depleted bottoms fraction produced from the heavy-ends distillation column.
A system for purifying a silane-containing stream comprising silane and one or more compounds having a boiling point greater than silane and one or more compounds with a boiling point less than silane, the system comprising:
- a light-ends distillation column for producing a silane-depleted overhead fraction and a silane-enriched bottoms fraction relative to the silane-containing stream, the silane-depleted overhead fraction comprising silane and compounds having a boiling point less than silane;
- a condenser for condensing a portion of the silane in the silane-depleted overhead fraction produced from the light-ends distillation column;
- a heavy-ends distillation column for producing a silane-enriched overhead fraction and a silane-depleted bottoms fraction relative to the silane-enriched bottoms fraction produced from the light-ends distillation column, the silane-depleted bottoms fraction produced from the heavy-ends distillation column comprising silane and being enriched in one or more compounds having a boiling point greater than silane relative to the silane-containing stream;
- a silane-recovery distillation column for producing a silane-recovery distillation column silane-enriched overhead fraction and a silane-recovery distillation column silane-depleted bottoms fraction relative to the silane-depleted bottoms fraction produced from the heavy-ends distillation column;
- a conveying apparatus for conveying the silane-recovery distillation column silane-enriched overhead fraction produced from the silane-recovery distillation column to the light-ends distillation column.
Dependencies are inferred from the claim text.