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US 8,524,044 B2Granted
Systems for recovering silane from heavy-ends separation operations
AssigneeMEMC Electronic Materials, Inc.
InventorsZhihui Gu, Timothy D. Truong, Puneet Gupta
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Abstract
Processes and systems for purifying silane-containing streams are disclosed with relatively less silane being lost in impurity streams by use of distillation and/or condensation operations.
Claims8
A system for purifying a silane-containing stream comprising silane and one or more compounds having a boiling point greater than silane and being substantially free of trichlorosilane, tetrachlorosilane and tetrafluorosilane, the system comprising:
- a silane-containing stream conveying apparatus for conveying the silane-containing stream to a heavy-ends distillation column, wherein the silane-containing stream conveying apparatus is operatively connected to the heavy-ends distillation column;
- the heavy-ends distillation column for producing a silane-enriched overhead fraction and a silane-depleted bottoms fraction relative to the silane-containing stream, the silane-depleted bottoms fraction produced from the heavy-ends distillation column comprising silane and being enriched in one or more compounds having a boiling point greater than silane relative to the silane-containing stream;
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- a silane-recovery distillation column for producing a silane-recovery column silane-enriched overhead fraction and a silane-recovery column silane-depleted bottoms fraction relative to the silane-depleted bottoms fraction produced from the heavy-ends distillation column.
1 more element
Dependencies are inferred from the claim text.