Method and device for cleaning substrates on a carrier
AssigneeGebr. Schmid GmbH & Co.
InventorsSven Worm, Reinhard Huber
Life of this patent
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Abstract
In the case of a device and a method for cleaning substrates on a carrier, to the underside of which the substrates are fastened so as to be parallel to and slightly apart from one another, the carrier has in its interior a plurality of longitudinal channels, which run parallel to one another. As a result of the sawing of the wafers, they merge, via openings, into interstices between the substrates. As a result of a relative movement, an elongate tube, from which cleaning fluid is let out, is introduced into one of the longitudinal channels, the relative movement being achieved substantially through moving of the carrier.
Claims9
A method for cleaning substrates on a flat, elongate carrier, said substrates being fastened by adhesive bonding, through outside faces, to an underside of said carrier so as to be parallel to and apart from one another, said carrier having in its interior a plurality of longitudinal channels, which run parallel to one another and which, on said underside of said carrier, merge into interstices between said substrates, the method comprising the steps of:
- introducing an elongate tube into at least one of said longitudinal channels through a relative movement of the elongate tube and the carrier, and
- in a following step, supplying cleaning fluid to said elongate tube and supplying the cleaning fluid from said elongate tube into said longitudinal channels and to said substrates, the cleaning fluid acting to clean said substrates and flushing through said interstices,
- wherein said relative movement is achieved substantially through moving of said carrier.
Dependencies are inferred from the claim text.