Self cleaning and adjustable slurry delivery arm

An apparatus for delivering fluids to a surface, comprising:

• a fixed portion of a fluid delivery arm supported on a base at one end;
• at least one rinse agent delivery line coupled to and disposed along at least a portion of the length of the fluid delivery arm;
• at least one slurry delivery line coupled to and disposed at least partially along a portion of the length of the fluid delivery arm;
• and
• an adjustable portion of the fluid delivery arm connected to the fixed portion by a hinge, the hinge further comprising:
• a fixed block connected to the adjustable portion;
• a hinge block connected to the fixed portion;
• and
• a hinge pin coupled between the fixed block of the adjustable portion and the hinge block of the fixed portion.

An apparatus for delivering fluids to a surface of a substrate or a pad, comprising:

• a delivery arm rotatably connected to a base and extending from the base;
• a first fluid manifold connected to a lower surface of the delivery arm and comprising a first plurality of slurry nozzles;
• a first slurry delivery line extending at least partially along the length of the delivery arm and in fluid communication with the first fluid manifold;
• at least one rinse agent delivery line extending at least partially along the length of the delivery arm;
• a plurality of rinse nozzles extending from the lower surface of the delivery arm and in fluid communication with the rinse agent delivery line;
• and
• a first two-way valve coupled to and in fluid communication with the first fluid manifold, the first slurry delivery line, and the rinse agent delivery line.