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US 8,523,138 B2Granted
Vacuum processing apparatus
AssigneeTokyo Electron Limited
InventorTakehiro Shindo
Life of this patent
Estimating the term…
Abstract
A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a movable cover covering an opening of the grease storage part and sliding while being in contact with an inner wall of the grease storage part. When the cover is pressed and moved, the grease is supplied into a grease inlet via a grease supply port.
Claims4
A vacuum processing apparatus applying vacuum processing to an object to be processed under a vacuum atmosphere, comprising:
- a vacuum chamber;
- and
- a grease supply mechanism provided in said vacuum chamber to supply grease to a slide mechanism sliding in said vacuum chamber,
- wherein said grease supply mechanism, comprising:
- a grease storage part;
- a movable piston sliding while being in contact with an inner wall of the grease storage part;
- and
- a bimetal connected to the piston, and
- wherein, when temperature rises, the bimetal deforms to move the piston, and causes grease in the grease storage part to be supplied.
6 more elements
Dependencies are inferred from the claim text.