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AssigneesTokyo Electron Limited, Sinfonia Technology Co., Ltd.
InventorsYasuhiro Tobe, Satoru Kawakami, Shinji Matsubayashi, Yosuke Muraguchi, Yasuyoshi Kitazawa, Yasumichi Mieno
Estimating the term…
An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section (2) of which inside is held in vacuum, a placing section (3) that is disposed inside the vacuum section (2) and is capable of placing a workpiece thereon, a linear motor 4) that includes coils (415) and makes the placing section (3) travel within the vacuum section, wherein air is placed inside the placing section (3) while being isolated from the vacuum section (2), and the coils (415) of the linear motor (4) are disposed inside the placing section (3).
A vacuum processing apparatus comprising a vacuum section of which inside is held in vacuum, a placing section that is disposed inside the vacuum section and is capable of placing a workpiece thereon, a linear motor that includes coils and a permanent magnet and makes the placing section travel within the vacuum section, and rails that support the placing section and guide the placing section along a traveling path thereof, wherein air is placed inside the placing section while being isolated from the vacuum section, the coils of the linear motor are disposed inside the placing section, and the linear motor is disposed so that the attraction force of the permanent magnet acts in a direction crossing the direction of the gravity acting on the placing section.
Dependencies are inferred from the claim text.