Template treatment method, program, computer storage medium, template treatment apparatus and imprint system

An imprint system comprising a template treatment apparatus for forming a film of a release agent on a template having a transfer pattern formed on a treatment surface thereof, said system comprising:

• an imprint unit for transferring the transfer pattern to a coating film formed on a substrate using the template having the film of the release agent formed on the treatment surface in said template treatment apparatus to thereby form a predetermined pattern in the coating film,
• said template treatment apparatus comprising a coating unit,
• said coating unit comprising:
• the template;
• a rotating and holding member for holding and rotating the template;
• a release agent nozzle for supplying the release agent to the treatment surface of the template;
• and
• an alcohol nozzle for supplying alcohol to the release agent on the template.